Low cost microscope add-on system for subpixel resolution displacement measurement

Abstract

Many complex and expensive mechanical systems exist, and their possibilities in many cases can be enhanced using modern electronics. As an example optic submicrometer range displacement measurement system may be. Submicrometer displacement measurements are mainly based on interferometric and correlation methods. Implementing interferometric methods in most cases is sophisticated, because of complexity an high price of supporting signal conditioning systems. Correlation methods are limited in resolution because offinite number ofpicture elements used in cross correlation realization. Our aim is to offer an effective, relatively cheap solution for submicrometer displacement measurements and to investigate metrological characteristics ofdeveloped system