Low actuation voltage RF MEMS Shunt Capacitive Switch based on rotated serpentine spring

Saffari, Hassan; Moghadam, Reza Askari; Tahmasebipour, Mohammad

doi:10.1109/iraniancee.2017.7985457

Cited by 8 publications

(4 citation statements)

References 21 publications

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“…x and k ′ y can be obtained by the spring constant of the four-beam design, as shown in equation (9). The spring constant of the seven-shaped beam is proportional to the thickness t, proportional to the cube of the width w 3 , and inversely proportional to the cube of the length L 3 .…”

Section: Comparison With Other Beamsmentioning

confidence: 99%

“…At present, many studies are focused on connecting beams, which can be roughly divided into four types, clamped-clamped * Author to whom any correspondence should be addressed. beam (also called fixed-fixed beam) [2,3], folded beam [4,5], serpentine beam [6][7][8][9][10][11] and crab-leg beam (also called L-shaped beam) [12][13][14][15][16][17]. These four types of spring beams have their own advantages and disadvantages in specific applications [18].…”

Section: Introductionmentioning

confidence: 99%

“…The classic serpentine beam acts like a spring in a retractable direction [6,7]. The rotated serpentine beam is based on the classic serpentine beam, and the spring is rotated 90 degrees [8][9][10]. This will achieve greater torsional spring constant.…”

Section: Introductionmentioning

confidence: 99%

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Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

Zhou,

Liu,

Cui

et al. 2023

J. Micromech. Microeng.

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The spring constant of the connecting beam is one of the most crucial factors that affect the detection sensitivity of MEMS sensors. Existing researches reduce the spring constant by changing the parameters or number of connecting beams. In this paper, we propose a seven-shaped beam structure to modify the spring constant of MEMS sensors. The acute angle between the two segments of seven-shaped structure lowers spring constant. Compared with the crab-leg beam, it can bring a maximum sensitivity gain of 1.29 times through different angle designs. At the same time, compared with those combined beams, seven-shaped combined beams can bring a maximum sensitivity gain of 1.6 times. The two-dimensional MEMS sensor with seven-shaped beam has been designed and fabricated. According to the experimental results, the sensor reached a detection sensitivity of 25 fF/g. The relative error of the differential capacitance change between the measurement result and the simulation result is only 8.6%.

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Section: Comparison With Other Beamsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

Zhou,

Liu,

Cui

et al. 2023

J. Micromech. Microeng.

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show abstract

“…in micromirrors [8], microgenerators [9], microrobots [10], drug delivery systems [11], precision fluid handling [12], micro/nano-positioning systems [13,14], micro-relays [15,16] and micro-valves [17,18]. Microactuators convert an electric signal to a mechanical displacement through various methods, such as electrostatic, piezoelectric, thermal, and electromagnetic [19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

A novel electromagnetic microactuator with a stainless steel mas-spring structure

Tahmasebipour

2022

J. Micromech. Microeng.

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Microactuators are one of the main components of the microelectromechanical and microfluidic systems and play a key role in their development. Many such systems, e.g., micropumps and microvalves, utilize an electromagnetic microactuator with a displacement range of a few micrometers traversed within a few seconds. Most of the electromagnetic microactuators have low lifetime and fracture toughness or low recovery speed. Microactuators with metallic mass-spring structure can overcome the mentioned disadvantages or limitations. This paper presents the design and fabrication of a novel stainless steel electromagnetic microactuator fabricated using micro-wire electrical discharge machining (µWEDM). The microactuator in question consists of a mass-and-spring structure made of 304 stainless steel, a permanent magnet made of NdFeB, and a microcoil. The impacts of the number of turns, distance, and electric current on the magnetic field of the microcoil and the displacement of the microactuator membrane with time have been investigated to determine the microactuator characteristics. The results indicated a displacement of about ±10 (20) μm within 7 s for an electric current of 1100 mA. This microactuator exhibits a faster response compared to the similar microactuators. Consequently, it can be used at higher operating frequencies and, thus, improves the fluid flow in micropumps.

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Design and simulation of RF-MEMS shunt switch for K-band applications

Sravani

2020

Microsyst Technol

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Low actuation voltage RF MEMS Shunt Capacitive Switch based on rotated serpentine spring

Cited by 8 publications

References 21 publications

Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

A novel electromagnetic microactuator with a stainless steel mas-spring structure

Design and simulation of RF-MEMS shunt switch for K-band applications

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