Low Actuating Voltage Spring-Free RF MEMS SPDT Switch

Abstract

RF MEMS devices are known to be superior to their solid state counterparts in terms of power consumption and electromagnetic response. Major limitations of MEMS devices are their low switching speed, high actuation voltage, larger size, and reliability. In the present paper, a see-saw single pole double throw (SPDT) RF MEMS switch based on anchor-free mechanism is proposed which eliminates the above-mentioned disadvantages. The proposed switch has a switching time of 394 nsec with actuation voltage of 5 V. Size of the SPDT switch is reduced by utilizing a single series capacitive switch compared to conventional switches with capacitive and series combinations. Reliability of the switch is improved by adding floating metal and reducing stiction between the actuating bridge and transmission line. Insertion loss and isolation are better than −0.6 dB and −20 dB, respectively, for 1 GHz to 20 GHz applications.

Micropits MEMS

“…µm x 300 µm, with a squared centered membrane of 100 µm x 100 µm, and supporting cross shaped arms widths 35.4 µm; figure 1d) shows the crosssection of the micropit. There are several eatching techniques and etchants for patterning the micropit, like dry or wet etching techniques and systems like deep reactive ion reactive (DRIE) that can also be used for micropit etching (Deepak et al, 2016;Dhineshkaarthi et al, 2017;González-Vidal et al, 2005b, 2018Vázquez Acosta & et al, 2012a).…”

Three-Axes Mems Calibration Using Kalman Filter and Delaunay Triangulation Algorithm

“…A suitable calibration method needs to decrease the mistakes that are inherent in them. Tese sensors found usage in a wide range of applications, including navigation and positioning systems, educational software, medical electronics, and more [1][2][3]. Researchers have also recently examined the usage of MEMS devices in user interfaces [4][5][6].…”