An atomic oxygen beam and mass spectrometer were used to measure the oxygen atom reflection γ16, recombination γ32, general surface reaction γM, and occlusion γ0 probabilities on six different engineering surfaces as a function of atomic oxygen exposure. The materials studied include gold, Nichrome V, aluminum, titanium, silver, and platinum. The reflection probability was seen to range from an initial total loss (at time of exposure equal to zero) on aluminum, titanium, and platinum to an observed maximum of 0.65 on titanium after 8.5 h of exposure. Recombination was seen on all surfaces except aluminum and platinum, the maximum recombination probability γ32 being 0.27 on gold after 19 h of exposure. The molecules H2O, CO, and CO2 were produced in a first‐order reaction of atomic oxygen with surface hydrogen and carbon with varying probabilities.