Loop Stiffness of Grinding Machine Developed for 450 mm Silicon Wafers

Kusuyama, Jumpei; Iwahashi, Shintaro; Kitajima, Takayuki; Ogasawara, Nagahisa; Yui, Akinori; Saito, Hirotsugu; Slocum, Alexander H.

doi:10.4028/www.scientific.net/amr.806.655

AMR

2015

DOI: 10.4028/www.scientific.net/amr.806.655

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Loop Stiffness of Grinding Machine Developed for 450 mm Silicon Wafers

Jumpei Kusuyama¹,

Shintaro Iwahashi²,

Takayuki Kitajima³

et al.

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Loop Stiffness of Grinding Machine Developed for 450 mm Silicon Wafers

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