Long Wavelength Metal-semiconductor-metal Photodiodes With Transparent Cadmium Tin Oxide Schottky Contacts

Gao, Wei; Khan, A. H.; Berger, Paul R.; Hunsperger, Robert G.; Zydzik, G. J.; O’Bryan, H. M.; Sivco, Deborah L.; Cho, A.Y.

doi:10.1109/leosst.1994.700558

Proceedings of IEE/LEOS Summer Topical Meetings: Integrated Optoelectronics

DOI: 10.1109/leosst.1994.700558

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Long Wavelength Metal-semiconductor-metal Photodiodes With Transparent Cadmium Tin Oxide Schottky Contacts

Wei Gao

A. H. Khan²,

Paul R. Berger³

et al.

Abstract: A metal-semiconductor-metal (MSM) Ino.53G~.47As photodiode using a transparent cadmium tin oxide (CTO) layer for the interdigitated electrodes was investigated. The CTO functions as a Schottky contact, an optical window and an anti-reflection (AR) coating.

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Long Wavelength Metal-semiconductor-metal Photodiodes With Transparent Cadmium Tin Oxide Schottky Contacts

Abstract: A metal-semiconductor-metal (MSM) Ino.53G~.47As photodiode using a transparent cadmium tin oxide (CTO) layer for the interdigitated electrodes was investigated. The CTO functions as a Schottky contact, an optical window and an anti-reflection (AR) coating.

Cited by 1 publication

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In/sub 0.53/Ga/sub 0.47/As MSM photodiodes with transparent CTO Schottky contacts and digital superlattice grading

In/sub 0.53/Ga/sub 0.47/As MSM photodiodes with transparent CTO Schottky contacts and digital superlattice grading

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