Long-term stability of Ru-based protection layers in extreme ultraviolet lithography: A surface science approach

Abstract

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Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen

“…In an oxygen containing ambient, a RuO 2 (1 1 0) surface is terminated by rows of differently coordinated O atoms in the [0 0 1] direction [26][27][28]; see When oxygen is absent in the gas phase, i.e. in UHV, the O ot atoms will desorb from the RuO 2 (1 1 0) surface in the temperature range of 100-200°C with a second order kinetics [29].…”

“…O/m 2 and that the thickness of a monolayer (i.e., the distance between two (1 1 0) planes) equals 0.317 nm (as determined by using lattice constants from Ref. [26,27]). Hence: where C is a constant (6.36 Â 10 19 m À2 nm À1 ) and J H is 2 Â 10 19 at.…”

“…[22,[26][27][28][29][32][33][34][35][36][37][38] with, e.g., temperature controlled reaction (TPR), scanning tunneling microscopy (STM), high resolution core level shift spectroscopy (HR CLS), surface X-ray diffraction (SXRD), low energy electron diffraction (LEED) etc. in combination with DFT calculations.…”

Laser Production of Extreme Ultraviolet Light Source for the Next Generation Lithography Application

“…The EUV exposure system includes several (typically 6 or 8) Mo/Si multilayer mirrors [20], each of which has high reflectivity not only for in-band light but also for OOB light, at wavelengths longer than 130 nm. Such OOB radiation can range across the spectrum from vacuum ultraviolet (VUV) to infrared (IR) [1], seriously degrading EUVL performance.…”

Growth and thermal oxidation of Ru and ZrO2 thin films as oxidation protective layers

“…233 Thus, the formation of a surface RuO2 nuclei, catalyze the O2 dissociation, selfaccelerating the oxide growth process. 234 This results in a self-limited growth of ~1.6 nm-thick RuO2(110) layer on Ru(001) surface over a large temperature, and O2 pressure range from ~280 to ~380°C, and 10 -4 to 10 mbar, respectively. 230 However, since this autocatalytic oxidation process for Ru and, other metals such as Pb, 235 in general, occurs at enhanced temperatures, where the kinetic barriers for oxide formation ("nucleation") are overcome, thermodynamics become more relevant.…”