Localized Surface Plasmonic Resonance of an Al Nanorod Array on High-Quality AlN Templates into the Far-UVC Spectral Region
Hung-Chang Hsieh,
Wen-Hsuan Hsieh,
Shing-Hong Hou
et al.
Abstract:Localized surface plasmon resonance (LSPR) in the far-UVC regions is demonstrated with a monolithic Al nanorod array on an AlN template. A 40 nm low-index SiO 2 spacer is inserted between the AlN and Al nanorods to reduce the ambient refractive index to blue-shift the extinction peak wavelength. To further blue-shift the extinction peak down to the far-UVC region with a resolution that is compatible with the metal lift-off process by e-beam lithography, the Al nanorods have to be sufficiently high to decouple … Show more
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