Optical beam induced current (OBIC) and photoluminescence (PL) implemented in a scanning optical microscope (SOM) have been extensively used in the study of the degradation mechanisms of optoelectronic devices. High sensitivity and spatial resolution in the localization of defects are demonstrated, unique analytical schemes are described and the new confocal photoluminescence (CPL) technique is introduced. Theoretical analysis and computations support the experimental results.