ABSTRACTLocal vibrational modes (LVMs) of carbon-hydrogen (C-H) complexes in proton implanted AlGaN grown on sapphire by metalorganic chemical vapor deposition (MOCVD) were investigated using Fourier transform infrared (FTIR) spectroscopy. The LVMs exhibit five distinctive peaks in the spectral region of 2846-2963 cm-', which are due to the symmetric and asymmetric stretching modes of C-H. (n=1-3). The LVMs intensities in doped A1GaN are increased as irradiation dose is increased in the entire irradiation dos…
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