2014
DOI: 10.1016/j.microrel.2014.07.043
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Local thickness and composition analysis of TEM lamellae in the FIB

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Cited by 9 publications
(6 citation statements)
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“…Quartz) could be used to increase the depth of focus approximately 2.2-fold (Supplementary Table 1). This is an important consideration to exploit super SIL imaging in correlative light and electron microscopy (CLEM), where cell lamella thickness is in the range of 50–300 nm 46 . A suitable technique for nanoscale resolution under cryogenic conditions, like cryo- super SIL STORM, can provide true complementarity between EM and fluorescence microscopy, crucial to realize the promise of CLEM in biology 47 .…”
Section: Resultsmentioning
confidence: 99%
“…Quartz) could be used to increase the depth of focus approximately 2.2-fold (Supplementary Table 1). This is an important consideration to exploit super SIL imaging in correlative light and electron microscopy (CLEM), where cell lamella thickness is in the range of 50–300 nm 46 . A suitable technique for nanoscale resolution under cryogenic conditions, like cryo- super SIL STORM, can provide true complementarity between EM and fluorescence microscopy, crucial to realize the promise of CLEM in biology 47 .…”
Section: Resultsmentioning
confidence: 99%
“…It is worth noting that the depth of focus of a superSIL microscope depends on the refractive index of the superSIL material, allowing a degree of depth "tuning". This is an important consideration to exploit superSIL imaging in CLEM, where lamella thickness is in the range of 50-300 nm [45]. If required, superSIL materials of lower refractive indexes (such as Quartz) can be used to increase the depth of focus approximately 2.2-fold (Table S1).…”
Section: Resultsmentioning
confidence: 99%
“…[1][2][3][4][5][6][7] Determination of sample thickness during the milling process might thus allow the milling process to be stopped at precisely the required endpoint and thereby improve both quality and throughput of sample preparation. In SEM and TEM instruments, information along the z dimension of electron transparent samples can be obtained by backscattered electron imaging, [8] energy dispersive X-ray spectroscopy (EDX) analysis, [8,9] TEM tomography, [10] zero-loss TEM imaging, [11] the calibration of secondary electron signal intensity ratio in the SEM image to electron energy loss spectroscopy (EELS) measurements, [12] or by comparison of a calibrated STEM image with a simulation of a known sample geometry, which is called quantitative STEM (qSTEM). [13,14] Most methods require independent calibration before each imaging session to account for specific imaging settings.…”
Section: Introductionmentioning
confidence: 99%
“…In SEM and TEM instruments, information along the z dimension of electron transparent samples can be obtained by backscattered electron imaging, [ 8 ] energy dispersive X‐ray spectroscopy (EDX) analysis, [ 8,9 ] TEM tomography, [ 10 ] zero‐loss TEM imaging, [ 11 ] the calibration of secondary electron signal intensity ratio in the SEM image to electron energy loss spectroscopy (EELS) measurements, [ 12 ] or by comparison of a calibrated STEM image with a simulation of a known sample geometry, which is called quantitative STEM (qSTEM). [ 13,14 ]…”
Section: Introductionmentioning
confidence: 99%