The problem of subsonic flow past micro-electro-mechanical-type (MEMS-type) heating elements placed on a flat surface, where the MEMS devices have hump-shaped surfaces, is investigated using triple deck theory. The compressible Navier-Stokes equations supplemented by the energy equation are considered in the limit that the Reynolds number is large. The triple deck problem is formulated and the linear and non-linear analysis and results are presented. The current work is a generalisation of the problem discussed by (Koroteev & Lipatov 2012, 2013 where the MEMS devices have flat shaped surfaces. The results show the hump-shaped heating elements enhance large drops in pressure and peaks and troughs in the skin-friction over the centre of the hump as compared to the flat shaped devices which may be useful for controlling the flow.Key words: Authors should not enter keywords on the manuscript, as these must be chosen by the author during the online submission process and will then be added during the typesetting process (see http://journals.cambridge.org/data/relatedlink/jfmkeywords.pdf for the full list)