Local Structures of Carbon Thin Films Synthesized by the Hot Filament Chemical Vapor Deposition Method X-Ray-Absorption Near-Edge Structure and Raman Spectroscopic Studies

Edamatsu, Kunishige; Takata, Y.; Yokoyama, Toshihiko; Seki, Kazuhiko; Tohnan, Masanao; Okada, Tadashi; Ohta, Toshiaki

doi:10.1143/jjap.30.1073

Cited by 25 publications

(6 citation statements)

References 53 publications

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“…This corresponds to the absorption maximum at 285.SeV in the spectra of C 60 , 28 the strong absorption of benzene adsorbed on Pt(ll 1) peaking at 286 eV with a broad tail, 29 carbons, 31 and carbon films made by CVD. 32 All these peaks have been assigned to the Cls to n* transitions in the aromatic rings; therefore, the absorption peak "A" at 285.6eV of PET and PEN can be similarly assigned. Peak "A" corresponds to that at 284.7 eV in the EELS spectrum of PET.…”

Section: Absorption Spectra Near Carbon K-edgementioning

confidence: 99%

Core Electron Absorption Spectra of Poly(ethylene terephthalate) and Poly(ethylene 2,6-naphthalate) Films

Ouchi

Nakai

Kamada

et al. 1995

Polym J

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ABSTRACT:Absorption spectra by means of the transmission method and total electron yield method were obtained for poly(ethylene terephthalate) (PET) and poly(ethylene 2,6-naphthalate) (PEN) films in the soft X-ray region by use of synchrotron radiation. The absorptions at 285.6 and 289.3 eV were due to Cls->n* transitions, showing stronger intensities for obliquely incident light than for normal. Broad absorptions consisting of humps at 293.5, 296.9, and 304.5 eV were originated in Cls->cr* transitions, having stronger intensities for an incident beam normal to the film plane than for oliquely incident light. The strong absorption of core electrons of oxygen appeared near 540.5 eV and was attributed to an Ols--.cr* transition; a neighboring peak at 532.3 eV was sensitive to the incident angle and was assigned as O!s--.n* transition. Oscillator strength and other optical features are briefly discussed. KEY WORDSPolarized Absorption Spectra / Synchrotron Radiation / Poly(ethylene terephthalate) / Poly(ethylene naphthalate) / Biaxially Oriented Films/ Total Electron Yield/ Transmission / Carbon K Edge/ Oxygen K Edge / Oscillator Strength / Absorption and em1ss10n spectra of the valence electrons of poly(ethylene terephthalate) (PET) have been studied for the clarification of photochemical and photophysical features. 1 -10 The polarized absorption and reflection spectra of uniaxially drawn PET films were analyzed in detail in the ultraviolet region down to 190 nm (or up to about 6.5 eV); the transition energies observed therein were compared with theoretical values from molecular orbital calculations. 8 -i O The emission spectra were measured and their origins were discussed. 4 -8 • 1° Furthermore, X-ray photoelectron spectrum of the valence band of PET in the binding energy up to about 30 e V was obtained by use of synchrotron radiation, together with simulation calculations 11 • 12 ; conformational effects were revealed in the spectra. 12 The spectroscopy related to the core electrons, whose energy corresponds to far ultraviolet or soft X-ray, has been studied for PET by means of X-ray photoelectron spectroscopy (XPS); whereby, assignments were given for three kinds of carbon ( carbonyl, aromatic, and aliphatic) and two kinds of oxygen (carbonyl and ester). 12 -15 Recently, electron energy loss spectroscopy (EELS) was applied to PET 16 ; spectral features of this polymer were discussed with the aid of core excitation spectra of small molecule analogues and extended Ruckel molecular orbital calculations of dimethylterephthalate.Absorption spectra of core electrons of polymers were first obtained by Seki et a/ 1 7 for very thin oriented syndiotactic 1,2-polybutadiene films. By use of a synchrotron radiation, they observed anisotropic absorp-127

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Section: Absorption Spectra Near Carbon K-edgementioning

confidence: 99%

Core Electron Absorption Spectra of Poly(ethylene terephthalate) and Poly(ethylene 2,6-naphthalate) Films

Ouchi

Nakai

Kamada

et al. 1995

Polym J

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“…The second peak at ≈286.1 eV (third dotted line) is related to C 1 s → π* transitions induced by the presence of oxygen at the sample surface. The third feature at ≈287.9 eV (fourth dotted line) is assigned to the 1 s → σ*(C-H) transitions 47 . This resonance is attributed to sp 3 coordination.…”

Section: Resultsmentioning

confidence: 99%

Soft X-ray Reflection Spectroscopy for Nano-Scaled Layered Structure Materials

Majhi

Nayak

Pradhan

et al. 2018

Sci Rep

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We introduce a novel approach that addresses the probing of interfacial structural phenomena in layered nano-structured films. The approach combines resonant soft x-ray reflection spectroscopy at grazing incidence near the “critical angle” with angular dependent reflection at energies around the respective absorption edges. Dynamic scattering is considered to determine the effective electron density and hence chemically resolved atomic profile across the structure based on simultaneous data analysis. We demonstrate application of the developed technique on the layered model structure C (20 Å)/B (40 Å)/Si (300 Å)/W (10 Å)/substrate. We precisely quantify atomic migration across the interfaces, a few percent of chemical changes of materials and the presence of impurities from top to the buried interfaces. The results obtained reveal the sensitivity of the approach towards resolving the compositional differences up to a few atomic percent. The developed approach enables the reconstruction of a highly spatio-chemically resolved interfacial map of complex nano-scaled interfaces with technical relevance to many emerging applied research fields.

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“…(17)(18)(19) The technique determines the sp 2 /sp 3 ratio of carbon atoms in DLC film with high accuracy, because the excitation from the 1s orbital to π-character empty state can be separately observed. (20)(21)(22) The C K-edge NEXAFS spectra of H-DLC films in our study were measured in the photon energy range of 270-330 eV.…”

Section: Local Structure Of Carbon Atoms From Nexafs Measurementmentioning

confidence: 99%

Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation

2017

Sensors and Materials

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We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.

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Local Structures of Carbon Thin Films Synthesized by the Hot Filament Chemical Vapor Deposition Method X-Ray-Absorption Near-Edge Structure and Raman Spectroscopic Studies

Cited by 25 publications

References 53 publications

Core Electron Absorption Spectra of Poly(ethylene terephthalate) and Poly(ethylene 2,6-naphthalate) Films

Core Electron Absorption Spectra of Poly(ethylene terephthalate) and Poly(ethylene 2,6-naphthalate) Films

Soft X-ray Reflection Spectroscopy for Nano-Scaled Layered Structure Materials

Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation

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