2015
DOI: 10.1080/10584587.2015.1044874
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Local Field Enhancement Characteristics in a Tapered Metal-Coated Optical Fiber Probe for Nanolithography

Abstract: In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new p… Show more

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Cited by 28 publications
(1 citation statement)
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“…The electrode pattern is realized by two pieces of 120 * 120 pads connected by 180 µm -long and 80 µm wide lines. Thereafter, 100 nm thick metal Ni was sputtered by magnetron sputtering (Denton Co. Ltd., Moorestown, NJ, USA), and then the metal adhered to the PMMA was peeled off to obtain a desired electrode [22,23]. The two metal electrodes were separated by a gap of 1 µm.…”
Section: Methodsmentioning
confidence: 99%
“…The electrode pattern is realized by two pieces of 120 * 120 pads connected by 180 µm -long and 80 µm wide lines. Thereafter, 100 nm thick metal Ni was sputtered by magnetron sputtering (Denton Co. Ltd., Moorestown, NJ, USA), and then the metal adhered to the PMMA was peeled off to obtain a desired electrode [22,23]. The two metal electrodes were separated by a gap of 1 µm.…”
Section: Methodsmentioning
confidence: 99%