2005
DOI: 10.1016/j.apsusc.2004.09.172
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Local electronic and chemical structure at GaN, AlGaN and SiC heterointerfaces

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“…Lateral DRCLS obtained from specific depths provides information on composition and defects to account for the variations in HEMT properties. Figures 18(a) and (b) depict the lateral and cross-sections geometries of this application, respectively [101][102][103][104][105][106]. Figure 18(a) shows how DRCL spectra are acquired at increasing radial distances of the wafer.…”
Section: Application To Transistorsmentioning
confidence: 99%
“…Lateral DRCLS obtained from specific depths provides information on composition and defects to account for the variations in HEMT properties. Figures 18(a) and (b) depict the lateral and cross-sections geometries of this application, respectively [101][102][103][104][105][106]. Figure 18(a) shows how DRCL spectra are acquired at increasing radial distances of the wafer.…”
Section: Application To Transistorsmentioning
confidence: 99%