2022
DOI: 10.1039/d2tc02682a
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Local chemical origin of ferroelectric behavior in wurtzite nitrides

Abstract: Ferroelectricity enables key modern technologies from non-volatile memory to precision ultrasound. The first known wurtzite ferroelectric Al1-xScxN has recently attracted attention because of its robust ferroelectricity and Si process compatibility,...

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Cited by 27 publications
(41 citation statements)
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“…We attribute the higher substitution level at which we observe phase-pure wurtzite compared to previous reports to different deposition conditions. We have previously extensively optimized for nonequilibrium growth conditions (i.e., deposition temperature, process pressure, gas ratios) based on our past experience with related Al 1– x M x N alloys. , , We expect that additional optimization of growth parameters may be able to further increase the amount of Gd 3+ that can be incorporated into AlN.…”
Section: Resultsmentioning
confidence: 99%
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“…We attribute the higher substitution level at which we observe phase-pure wurtzite compared to previous reports to different deposition conditions. We have previously extensively optimized for nonequilibrium growth conditions (i.e., deposition temperature, process pressure, gas ratios) based on our past experience with related Al 1– x M x N alloys. , , We expect that additional optimization of growth parameters may be able to further increase the amount of Gd 3+ that can be incorporated into AlN.…”
Section: Resultsmentioning
confidence: 99%
“…We have previously extensively optimized for nonequilibrium growth conditions (i.e., deposition temperature, process pressure, gas ratios) based on our past experience with related Al 1−x M x N alloys. 10,[19][20][21]24 We expect that additional optimization of growth parameters may be able to further increase the amount of Gd 3+ that can be incorporated into AlN.…”
Section: Thermodynamics Of Al 1−x Gdmentioning
confidence: 99%
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