Lithium niobate ridge waveguides and modulators fabricated using smart guide

Rabiei, Payam; Steier, William H.

doi:10.1063/1.1906311

Cited by 110 publications

(53 citation statements)

References 11 publications

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“…Some encouraging results were obtained in studies of LNOI-based optical elements, such as photonic crystals [4,5], high-Q microresonators [6][7][8], ridge-waveguides [9,10], proton-exchanged waveguides [11][12][13] and modulators [14], hybrid lightwave circuits LNOI-SOI [15], etc. These results indicate that LNOI is an appropriate platform for integrated optics.…”

Section: Introductionmentioning

confidence: 99%

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Volk

Гайнутдинов

Zhang³

2017

Crystals

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Photonic structures denoted as LNOI (LiNbO 3 -on-insulator) are of considerable interest for integrated optics due to a high refractive-index contrast provided by the interface LiNbO 3 /insulator. A topical problem for LNOI-based optical waveguides is optical-frequency conversion, in particular realized on ferroelectric domains on the basis of quasi phase-matching principle. This paper presents extended studies on the fabrication of domain patterns by atomic force microscopy (AFM) methods (raster lithography, piezo-force microscopy, conductive AFM) in single-crystal ion-sliced LiNbO 3 films forming LNOI sandwiches. A body of data obtained on writing characteristics of domains and specified 1D and 2D domain patterns permitted us to manipulate the domain sizes and shapes. Of special importance is the stability of created patterns, which persist with no degradation during observation times of months. The domain coalescence leading to the transformation of a discrete domain pattern to a continuous one was investigated. This specific effect-found in thin LiNbO 3 layers for the first time-was attributed to the grounding of space-charges accumulated on domain walls. Observations of an enhanced static conduction at domain walls exceeding that in surrounding areas by not less than by five orders of magnitude supports this assumption. AFM domain writing in ion-sliced films serves as a basis for studies in nonlinear photonic crystals in integrated optical schemes.

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Section: Introductionmentioning

confidence: 99%

Domain Patterning in Ion-Sliced LiNbO3 Films by Atomic Force Microscopy

Volk

Гайнутдинов

Zhang³

2017

Crystals

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“…Apart from ridge modulators, another way of enhancing the field confinement is given by thin plate modulators [7,42] (see Fig. 6b).…”

Section: Device Structuresmentioning

confidence: 99%

“…Dry etching techniques generally involve the use of a plasma or ion beam to physically (or physically and chemically) remove exposed parts of the material. Focused ion beam etching was reported in the fabrication of waveguides for complex devices [42]. Nevertheless, the use of a lithographic mask together with a large area etching is more suitable for batch production.…”

Section: Micro-engineering Techniquesmentioning

confidence: 99%

Micro‐structured integrated electro‐optic LiNbO₃ modulators

Janner¹,

Tulli

Garcia-Granda

et al. 2009

Laser & Photonics Reviews

151

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In this paper, we will review the state-of-the-art of LiNbO3 based integrated electro-optic modulators and will show how micro-structuring techniques such as etching, domain inversion and thin film processing can be used to realize new configurations which can take the performance to unprecedented levels. In particular, we will review recent results on the use of domain inversion on a micron scale and we report on the fabrication of a chirp-free modulator having ∼ 2 V switching voltage and bandwidth of 15 GHz designed by placing the waveguide arms of the Mach-Zehnder interferometer in opposite domain oriented regions. We also review some of the new modulation formats (e.g. DQPSK) that can represent an application development of the presented micro-structured devices. Finally, we address the issue of the integration of the modulator chip in a transmitter board comprising tunable laser, bias-control electronics and RF driver. The requirements of integration can even push further the reduction in size of modulator chips, thus making more crucial the use of micro-and nano-structuring techniques.Mach-Zehnder modulator exploiting domain inversion for ultralow voltage operation.

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“…Strong-guiding, high-refractive-index-contrast structure based on LN thin film enables ultra-small waveguides with a crosssection below 1 lm 2 and bending radii smaller than 10 lm, resulting in the development of ultra-compact photonic-integrated devices and circuits [2]. There are a few methods to form lithium niobate thin films, such as evaporation, sputtering, and epitaxy.…”

Section: Introductionmentioning

confidence: 99%