Lithium Niobate and Electrooptic Guided-wave Optical Switch

Okayama, Hideaki

doi:10.1016/b978-012225262-4/50009-x

WDM Technologies 2003

DOI: 10.1016/b978-012225262-4/50009-x

|View full text |Cite

Lithium Niobate and Electrooptic Guided-wave Optical Switch

Hideaki Okayama

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2016

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

References 119 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Diamond micro-milling of lithium niobate for sensing applications

Huo

Choong

Shi

et al. 2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

Lithium niobate (LiNbO 3 ) is a crystalline material which is widely applied in surface acoustic wave, microelectromechanical systems (MEMS), and optical devices, owing to its superior physical, optical, and electronic properties. Due to its low toughness and chemical inactivity, LiNbO 3 is considered to be a hard-to-machine material and has been traditionally left as as an inert substrate upon which other micro structures are deposited. However, in order to make use of its superior material properties and increase efficiency, the fabrication of microstructures directly on LiNbO 3 is in high demand. This paper presents an experimental investigation on the micro machinability of LiNbO 3 via micro milling with the aim of obtaining optimal process parameters. Machining of micro slots was performed on Z-cut LiNbO 3 wafers using single crystal diamond tools. Surface and edge quality, cutting forces, and the crystallographic effect were examined and characterized. Ductile mode machining of LiNbO 3 was found to be feasible at a low feed rate and small depth of cut. A strong crystallographic effect on the machined surface quality was also observed. Finally, some LiNbO 3 micro components applicable to sensing applications were fabricated.

show abstract

Diamond micro-milling of lithium niobate for sensing applications

Huo

Choong

Shi

et al. 2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Lithium Niobate and Electrooptic Guided-wave Optical Switch

Cited by 1 publication

References 119 publications

Diamond micro-milling of lithium niobate for sensing applications

Diamond micro-milling of lithium niobate for sensing applications

Contact Info

Product

Resources

About