2015
DOI: 10.1016/j.ultras.2015.07.009
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Liquid sensor based on a piezoelectric lateral electric field-excited resonator

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Cited by 38 publications
(17 citation statements)
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References 13 publications
(29 reference statements)
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“…These resonators are sensitive to changes in the electrical conductivity and mechanical impedance of the medium in contact with the free side of the resonator, whereas the electrodes are located on the other side of the piezoelectric plate. In particular, the resonators with a lateral electric field have been applied as sensors to assess the viscosity and conductivity of a contacting liquid [9,10]. The effect of the conductivity of a thin layer located near the resonator on its characteristics has also been evaluated [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…These resonators are sensitive to changes in the electrical conductivity and mechanical impedance of the medium in contact with the free side of the resonator, whereas the electrodes are located on the other side of the piezoelectric plate. In particular, the resonators with a lateral electric field have been applied as sensors to assess the viscosity and conductivity of a contacting liquid [9,10]. The effect of the conductivity of a thin layer located near the resonator on its characteristics has also been evaluated [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…In this case, the selected shape of the electrodes retains the axial symmetry of the disk, which greatly simplifies its mathematical modeling by a two-dimensional finite element method. This is the advantage of the presented type of resonators relative to resonators with a transverse exciting field with flat electrodes [5][6][7][8], which cannot be correctly modeled by a two-dimensional finite element method in a wide frequency range. The combination of these properties makes it possible to apply the methods of broadband ultrasonic spectroscopy both to the resonator itself to refine its characteristics and to the resonator in acoustic contact with the medium under study, which makes it possible to determine the acoustic and electrical characteristics of the medium using just one broadband measurement.…”
Section: Discussionmentioning
confidence: 99%
“…Cylindrical piezoelectric transducers operating on a longitudinal acoustic mode are used for the emission and receiving of ultrasound in a liquid [1,2] and piezoelectric energy harvesting solutions [3,4]. Resonators with a transverse electric field are used for various sensor applications [5][6][7][8][9]. Resonators of this type are sensitive to mechanical and electrical properties of the medium, which borders on the free surface of the resonator [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…The BAW filters are more frequently used in high-frequency communication and sensing because of their higher power tolerance. The BAW filters are divided into film bulk acoustic resonator (FBARs) [ 2 , 3 , 4 ], solidly mounted resonators (SMRs) [ 5 , 6 ], and laterally-excited bulk-wave resonators (XBARs) [ 7 , 8 , 9 ], based on the structure difference. At present, the piezoelectric film materials used in the BAW resonators mainly include aluminum nitride, zinc oxide, and PZT.…”
Section: Introductionmentioning
confidence: 99%