2003
DOI: 10.1016/s0254-0584(02)00504-7
|View full text |Cite
|
Sign up to set email alerts
|

Liquid phase deposited SiO2 on GaN

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
9
0

Year Published

2008
2008
2017
2017

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 22 publications
(9 citation statements)
references
References 13 publications
0
9
0
Order By: Relevance
“…[12,13]. The absorption peak at 931 cm -1 is largely attributed to Si-F stretching vibration mode [12,13]. No other vibration signals of impurities such as carbon are detected by FTIR spectrometer, verifying the as-deposited LPD SiO 2 is F-doped SiO 2 with a pure chemical composition.…”
Section: Characterizationmentioning
confidence: 73%
See 1 more Smart Citation
“…[12,13]. The absorption peak at 931 cm -1 is largely attributed to Si-F stretching vibration mode [12,13]. No other vibration signals of impurities such as carbon are detected by FTIR spectrometer, verifying the as-deposited LPD SiO 2 is F-doped SiO 2 with a pure chemical composition.…”
Section: Characterizationmentioning
confidence: 73%
“…2(a) and (b), the high-coverage LPD SiO 2 film is uniformly and densely deposited on the pyramid textures of silicon substrate. [12,13]. The absorption peak at 931 cm -1 is largely attributed to Si-F stretching vibration mode [12,13].…”
Section: Characterizationmentioning
confidence: 99%
“…3a. This implied that the silicon oxide had good chemical purity [18,19]. The atom percentages of Si2p and O1 s were 18.8 % and 37.4 %, respectively, as shown in the right corner in Fig.…”
Section: Xps Analysismentioning
confidence: 80%
“…[4][5][6][7][8][9] Ceramics and ceramic coatings are of excellent insulating and resistivity properties and high resistance to oxidation, wear and corrosion even under high temperature condition. 10 Among the ceramics, Silica (SiO 2 ) 1,7,8,[10][11][12][13] is one of the widely used materials as the coatings to provide the metal materials with corrosion protection, which may have an edge both in corrosion resistance and chemical stability compared to titanium dioxide (TiO 2 ).…”
Section: Introductionmentioning
confidence: 99%