Liquid film formation on a rotating disk. (1st report, Numerical analysis at the initial stage).

The structure of mono-modal spherical particle sols was controlled by changing the rotation rate of the spin coating. The number of cluster formed in the spin coated layer was counted. The apparent viscosity of particle (13 µm dia.) sols was measured, and the cluster size and number of primary particles contained in the cluster were predicted by the Usui's suspension model, which makes assumption that multi-breakup of inter-particle bonding occurs when a cluster breaks into two parts under a simple shear flow by spin coating. It was certified that the maximum packing volume fraction for particles can be successfully used to predict the slurry viscosity, and this means indirectly the maximum packing volume fraction determined in this study may be reasonable. Good agreement of the number of cluster between experimental data and the prediction was obtained. This means that the Usui's model can be used to predict the controlled structure of particles in spin coating technology.

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Liquid film formation on a rotating disk. (1st report, Numerical analysis at the initial stage).

Cited by 2 publications

References 5 publications

Resist film formation in spin coating

Resist film formation in spin coating

Structure Control of Agglomerative Slurry of Mono-modal Particles by Spin Coating

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