Liquid Droplet Evaporation in Simulations of the Flow in Pulsed-Pressure MOCVD

Abstract

In this paper, a numerical model of the liquid precursor droplet flash evaporation and transport is introduced. This droplet model is coupled with the Quiet Direct Simulation (QDS) scheme to model the unsteady flow development in a Pulsed Pressure MOCVD reactor. A preliminary simulation of the PP-MOCVD process including the injection and pump down phase is conducted. The simulation results are consistent with the measured pressure change in the PP-MOCVD process.