Liquid antimony pentachloride as oxidant for robust oxidative chemical vapor deposition of poly(3,4-ethylenedioxythiophene) films

Mirabedin, Milad; Vergnes, Hugues; Caussé, Nicolas; Vahlas, Constantin; Caussat, Brigitte

doi:10.1016/j.apsusc.2021.149501

Cited by 12 publications

(15 citation statements)

References 32 publications

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“…3 Thus, the oCVD reaction of DPP derivatives should allow to go far beyond the state-of-the-art of DPP-based materials by eliminating the restrictions dictated by solution-based approaches and allowing the synthesis, engineering and integration of DPP-based conjugated polymers for optoelectronic and catalytic applications. Further improvements may also involve the use of liquid oxidants, such as antimony pentachloride (SbCl 5 ) and vanadium oxytrichloride (VOCl 3 ), [76][77][78] in replacement of solid oxidants like FeCl 3 or CuCl 2 whose by-products remain in the oCVD coatings. 59 Moreover, the delivery rate of liquid oxidants can be more precisely regulated, resulting in better control of the oxidant to monomer ratio.…”

Section: Paper Materials Advancesmentioning

confidence: 99%

Unsubstituted thiophene–diketopyrrolopyrrole conjugated polymer thin films via oxidative chemical vapor deposition – electronic behavior

et al. 2023

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Section: Paper Materials Advancesmentioning

confidence: 99%

Unsubstituted thiophene–diketopyrrolopyrrole conjugated polymer thin films via oxidative chemical vapor deposition – electronic behavior

et al. 2023

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“…Within the chemical vapor deposition community, it is well known and documented that relative concentration of precursors, deposition temperature, and vacuum pressure could also be used to fine-tune film growth temperature. 279,280 Also, the fluid dynamics of the reaction environment which is associated with reactor size and configuration as well as flow channels all play a role. For industrial adaptation, it is crucial to record, quantify and model these aspects.…”

Section: Industrialization and Scale-upmentioning

confidence: 99%

Oxidative chemical vapor deposition for synthesis and processing of conjugated polymers: a critical review

Dianatdar¹,

Bose²

2023

J. Mater. Chem. C

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“…With the SbCl 5 oxidant, uniform oCVD PEDOT was reported over 10-cm diameter silicon wafers. 6 In some cases, additional vapor-phase reactants, such as water or pyridine; or carrier gases, such as N 2 , are utilized along with the monomers and oxidants. Alternating periods of monomeronly and oxidant-only flow is termed oxidative molecular layer deposition (oMLD).…”

Section: Ocvd Chemistry and Processmentioning

confidence: 99%

Three-Dimensional (3D) Device Architectures Enabled by Oxidative Chemical Vapor Deposition (oCVD)

Gleason

2022

Organic Materials

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For fabricating devices with three-dimensional (3D) architectures, oxidative Chemical Vapor Deposition (oCVD) offers conformal nanocoatings of polymers with designable composition. Pure, uniform and pinhole-free oCVD layers are achievable with sub-10 nm thickness and sub-1 nm roughness. The low substrate temperature used for oCVD, allows direct deposition onto the thermally sensitive substrates desired for flexible and wearable devices. The oCVD polymers can graft to the underlying material. The covalent chemical bonds to the substrate create a robust interface that prevents delamination during the subsequent device fabrication steps and exposure to the environmental conditions of device operation. Both electrically conducting and semiconducting polymers have been synthesized by oCVD. Small ions act as dopants. The oCVD process allows for systematic tuning of electrical, optical, thermal, and ionic transport properties. Copolymerization with oCVD can incorporate specific organic functional groups into the resulting conjugated organic materials. This short review highlights recent examples of using oCVD polymer to fabricate organic and hybrid organic-inorganic devices. These optoelectronic, electrochemical, and sensing devices utilize 3D architectures made possible by the conformal nature of the oCVD polymers. Table of Contents: 1 Introduction 2 oCVD Chemistry and Process 3 Optoelectronic Devices 4 Electrochemical Devices 5 Sensing Devices 6 Conclusion

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Liquid antimony pentachloride as oxidant for robust oxidative chemical vapor deposition of poly(3,4-ethylenedioxythiophene) films

Cited by 12 publications

References 32 publications

Unsubstituted thiophene–diketopyrrolopyrrole conjugated polymer thin films via oxidative chemical vapor deposition – electronic behavior

Unsubstituted thiophene–diketopyrrolopyrrole conjugated polymer thin films via oxidative chemical vapor deposition – electronic behavior

Oxidative chemical vapor deposition for synthesis and processing of conjugated polymers: a critical review

Three-Dimensional (3D) Device Architectures Enabled by Oxidative Chemical Vapor Deposition (oCVD)

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