Line-to-line repetitive control of a 6-DoF hexapod stage for overlay measurements using Atomic Force Microscopy

Witvoet, Gert; Peters, Joost; Kuiper, Stefan; Oomen, Tom

doi:10.23919/acc.2019.8814385

Cited by 5 publications

(1 citation statement)

References 14 publications

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“…However, performance during velocity changes is not guaranteed. In Witvoet et al (2019), an alternative is presented where the fundamental disturbance frequency is chosen as small as possible covering a wide range of disturbance frequencies, which is rather pragmatic and may lead to worse stability margins. In Steinbuch (2002), RC has been extended with robustness against small variations in the disturbance frequency, however large or continuous variations are not covered.…”

Section: Introductionmentioning

confidence: 99%

Gaussian Process Repetitive Control for Suppressing Spatial Disturbances

Mooren¹,

Witvoet²,

Oomen³

2020

Preprint

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Motion systems are often subject to disturbances such as cogging, commutation errors, and imbalances, that vary with velocity and appear periodic in time for constant operating velocities. The aim of this paper is to develop a repetitive controller (RC) for disturbances that are not periodic in the time domain, yet occur due to an identical position-domain disturbance. A new spatial RC framework is developed, allowing to attenuate disturbances that are periodic in the position domain but manifest a-periodic in the time domain. A Gaussian process (GP) based memory is employed with a suitable periodic kernel that can effectively deal with the intermittent observations inherent to the position domain. A mechatronic example confirms the potential of the method.

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Section: Introductionmentioning

confidence: 99%