Line-field parallel spectral domain optical coherence tomography and its application in defect inspection

Zhao, Chen; Chen, Zhiyan; Ding, Zhihua; Peng, Li; Shen, Yi; Ni, Yang

doi:10.7498/aps.63.194201

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Acta Phys. Sin.

2014

DOI: 10.7498/aps.63.194201

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Line-field parallel spectral domain optical coherence tomography and its application in defect inspection

Chen Zhao¹,

Zhiyan Chen²,

Zhihua Ding³

et al.

Abstract: For the needs of online nondestructive testing method in glass industry, we have presented a large-range line-field parallel spectral domain optical coherence tomography system. Based on fast area scan CMOS camera, the whole cross-sectional image can be acquired by a single shot. Depth-resolved image at different lateral positions can be acquired simultaneously, without the lateral scanning mechanism. The axial resolution is 17.9 μm, the lateral resolutions in parallel direction and scanning direction are 55.7… Show more

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Cited by 6 publications

References 23 publications

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Real-time detection method for bulk bubbles in optics based on deep learning

et al. 2022

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The existence of bulk bubbles could decrease the laser-induced damage threshold of optics and affect the beam quality, so the detection of bulk bubbles is an essential step for quality assurance. Currently, the inspection of bubbles in optics relies on manual work, which is not recommended because of the low precision and inconsistency. To improve the quality evaluation process, a real-time detection method for bubbles inside the optics based on deep learning is proposed. Our method can implement bubble detection at 67 fps with a recall of 0.836. As for retrieval of the radius, it costs 58.8 ms on each bubble, and the absolute deviation is 3.73% on average. Our method conducts real-time and accurate detection of the positions and radii of the bubbles in the optics, thus, having significant potential for the manufacturing process.

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Real-time detection method for bulk bubbles in optics based on deep learning

et al. 2022

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Line Field Optical Coherence Tomography

et al. 2022

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The line field (LF) design choice for the lateral image formation mechanism (lateral format) has historically been a fraction of the whole optical coherence tomography (OCT) field. However, as the OCT technology develops, the parallelised acquisition of LF-OCT formats (LF-time domain (TD)-OCT, LF-spectral domain (SD)-OCT, LF-swept source (SS)-OCT) offers benefits and capabilities, which may mean it is now becoming more mainstream. Prior reviews on OCT have focused on scanning point (SP) and, to a lesser extent, full field (FF), lateral formats, with, to our knowledge, no prior review specifically on the LF lateral format. Here, we address this gap in the literature by reviewing the history of each LF-OCT format, identifying the applications it has had and providing generic system design overviews. We then provide an analysis and discussion of the benefits and drawbacks of the format.

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Ultrahigh-resolution optical coherence tomography and its application in inspection of industrial materials

Tang¹,

Chen²,

Chen³

et al. 2015

Acta Phys. Sin.

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Since many industrial materials have micro or submicro structures on the surface or subsurface, utrahigh-resolution is required in the inspection of these materials. Ultrahigh-resolution optical coherence tomography uses broadband light sources to achieve axial image resolutions on the scale of a few microns. We have been investigating an ultrahigh-resolution spectral-domain optical coherence tomography (SD-OCT) system using supercontinuum sources (SC) in free space. The effective SC spectrum has a full width at half maximum of 230 nm centered around 665 nm, and the imaging setup has an ultrahigh axial resolution of 0.9 μm in air, and a lateral resolution of 3.9 μm, with the system measurement range being 0.6 mm in axial direction. At a 50 μm axial position, the sensitivity can be 63 dB with 28600 axial scans per second at 2048 pixels per axial scan. Images of polystyrene microspheres solution with an average diameter of 5 μm and different sizes of industrial abrasive papers are presented to illustrate the performance of the system.

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Line-field parallel spectral domain optical coherence tomography and its application in defect inspection

Cited by 6 publications

References 23 publications

Real-time detection method for bulk bubbles in optics based on deep learning

Real-time detection method for bulk bubbles in optics based on deep learning

Line Field Optical Coherence Tomography

Ultrahigh-resolution optical coherence tomography and its application in inspection of industrial materials

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