Light Management of Aluminum Doped Zinc Oxide Thin Films by Fabricating Periodic Surface Textures Using Direct Laser Interference Patterning

Eckhardt, Sebastian; Roch, Teja; Sachse, Christoph; Lasagni, Andrés Fabían

doi:10.1002/adem.201300007

Cited by 8 publications

(5 citation statements)

References 16 publications

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“…The formation of the gratings by interfering pulsed laser beams has been discussed in the Refs. [24,25]. The grooves are deepest near the center of the micro grating where the local intensity of the interference modulated Gaussian intensity profile is strongest.…”

Section: Methodsmentioning

confidence: 98%

“…Direct laser texturing and laser induced periodic surface structuring (LIPSS) have been used to write periodic textures into silicon wafers . Likewise, direct laser patterning , direct laser interference patterning (DLIP) , and LIPSS , employing a variety of lasers and periodicities, have been used for texturing also of ZnO:Al. Among these methods, DLIP and LIPSS also allow for writing of periodic textures of submicron feature size suitable for light scattering in thin film solar cells.…”

Section: Introductionmentioning

confidence: 99%

“…www.pss-rapid.com laser interference patterning (DLIP) [23], and LIPSS [24], employing a variety of lasers and periodicities, have been used for texturing also of ZnO:Al. Among these methods, DLIP and LIPSS also allow for writing of periodic textures of submicron feature size suitable for light scattering in thin film solar cells.…”

mentioning

confidence: 99%

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Light trapping for a-Si:H/µc-Si:H tandem solar cells using direct pulsed laser interference texturing

Ring

Neubert

Schultz

et al. 2014

Phys. Status Solidi RRL

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We present a‐Si:H/µc‐Si:H tandem solar cells on laser textured ZnO:Al front contact layers. Direct pulsed laser interference patterning (DLIP) was used for writing arrays of one‐dimensional micro gratings of submicron period into ZnO:Al films. The laser texture provides good light trapping which is indicated by an increase in short‐circuit current density of 20% of the bottom cell limited device compared to cells on planar ZnO:Al. The open‐circuit voltage of the cells on laser textured ZnO:Al is almost the same as for cells on planar substrates, indicating excellent growth conditions for amorphous and microcrystalline silicon on the U‐shaped grating grooves. DLIP is a simple, single step and industrially applicable method for large area periodic texturing of ZnO:Al thin films. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)

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Section: Methodsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

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Light trapping for a-Si:H/µc-Si:H tandem solar cells using direct pulsed laser interference texturing

Ring

Neubert

Schultz

et al. 2014

Phys. Status Solidi RRL

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“…Since laser beams can be focused by optical lenses on minimal spot sizes of ~5 µm, another way of concentrating the light source has to be found. A solution to this problem is presented by a new way of laser interference technology 15,16 .…”

Section: Metallic Thin Films As Transparent High Performance Electrodesmentioning

confidence: 99%

Fabrication of highly efficient transparent metal thin film electrodes using Direct Laser Interference Patterning

Eckhardt

Müller‐Meskamp

Loeser

et al. 2015

Laser-Based Micro- And Nanoprocessing IX

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The demand of highly efficient transparent electrodes without the use of rare earth materials such as indium requires a new generation of thin metallic films with both high transparency and electrical conductivity. For this purpose, Direct Laser Interference Patterning was used to fabricate periodic hole-like surface patterns on thin metallic films in order to improve their optical transparency by selective laser ablation of the material and at the same time keeping the electrical properties at an acceptable level. Metallic films consisting of aluminum and copper with film thicknesses ranging between 5 and 40 nm were deposited on glass substrates and treated with nanosecond and picosecond pulse laser system. In order to analyze the processability of the films, the laser ablation threshold for each material as function of the layer thickness and pulse duration was firstly determined. After analyzing these initial experiments, the samples were structured with a 1.7 µm spatial period hole-like-pattern using three beam direct laser interference patterning. The structural quality of the fabricated structures was analyzed as function laser energy density (laser fluence) using scanning electron microscopy (SEM), atom force microscopy (AFM). Finally, optical and electrical properties of the films were characterized using optical spectroscopy, as well as surface impedance measurements.

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“…The preeminent examples are optical interference lithography on photoresists and nanosphere lithography in combination with surface etching. 19 The method of direct laser interference patterning developed by Sebastian Eckhardt 20 is used for fabricating periodic surface textures on aluminum-doped zinc oxide (AZO).…”

Section: Introductionmentioning

confidence: 99%

Broadband light trapping based on periodically textured ZnO thin films

Liu

Liang

et al. 2015

Nanoscale

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Transparent conductive front electrodes (TCFEs) deployed in photovoltaic devices have been extensively studied for their significance in transporting carriers, coupling and trapping the incident photons in high-performing solar cells. The trade-off between the light-transmission, electrical, and scattering properties for TCFEs to achieve a broadband improvement in light absorption in solar cells while maintaining a high electrical performance has become the key issue to be tackled. In this paper, we employ self-assembled polystyrene (PS) spheres based on a sauna-like method as a template, followed by a double-layer deposition and then successfully fabricate highly-transparent, well-conductive, and large-scale periodically-textured ZnO TCFEs with broadband light trapping properties. A sheet resistance below 15 Ω sq(-1) was achieved for the periodically-textured ZnO TCFEs, with a concomitant average transmission of 81% (including the glass substrate) in the 400-1100 nm spectral range, a haze improvement in a broadband spectral range, and a wider scattering angular domain. The proposed approach affords a promising alternative method to prepare periodically-textured TCFEs, which are essential for many optoelectronic device semiconductors, such as photovoltaic and display applications.

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Light Management of Aluminum Doped Zinc Oxide Thin Films by Fabricating Periodic Surface Textures Using Direct Laser Interference Patterning

Cited by 8 publications

References 16 publications

Light trapping for a-Si:H/µc-Si:H tandem solar cells using direct pulsed laser interference texturing

Light trapping for a-Si:H/µc-Si:H tandem solar cells using direct pulsed laser interference texturing

Fabrication of highly efficient transparent metal thin film electrodes using Direct Laser Interference Patterning

Broadband light trapping based on periodically textured ZnO thin films

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