“…Among several structures of gas sensors, a metal oxide semiconductor (MOS) gas sensor is the most attractive structure due to its inherent advantages of easy fabrication, simple operation, low prices, and a small size [ 3 ]. Many metal oxide semiconductor materials have played promising roles in resistive types of MOS-structured gas sensors, such as zinc oxide (ZnO) [ 4 , 5 ], stannic oxide (SnO 2 ) [ 6 , 7 ], titanium dioxide (TiO 2 ) [ 8 , 9 ], indium oxide (In 2 O 3 ) [ 10 , 11 ], and gallium oxide (Ga 2 O 3 ) [ 12 , 13 ]. Among the metal oxide semiconductor materials, in view of the advantages of non-toxicity, low prices, and good chemical stability [ 14 , 15 ], Ga 2 O 3 has potential applications in high-temperature gas sensors [ 16 , 17 ].…”