2010
DOI: 10.1246/bcsj.20100056
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Light-Controlled Selective Metal Deposition on a Photochromic Diarylethene Film—Toward New Applications in Electronics and Photonics—

Abstract: Selective metal deposition controlled by light irradiation was achieved for Zn, Mg, and Mn on a photochromic diarylethene (DAE) film; metal vapor atoms were deposited only on the colored film but not on the uncolored film. The deposition properties of the metals were strongly dependent on the deposition rates. Fine metal patterns were produced by laser scanning and a conventional vacuum-evaporation method without a shadow mask. Multiple-metal pattern preparation of Zn, Mg, and Mn via a maskless evaporation in … Show more

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Cited by 24 publications
(23 citation statements)
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“…855,856 The multiple-metal patterning with maskless evaporation via a single vacuum process was demonstrated as shown in Figure 81.…”
Section: Selective Metal Depositionmentioning
confidence: 99%
“…855,856 The multiple-metal patterning with maskless evaporation via a single vacuum process was demonstrated as shown in Figure 81.…”
Section: Selective Metal Depositionmentioning
confidence: 99%
“…Selective metal‐vapor deposition for various metal species is possible by adjusting the deposition rate. Figure a shows the selective depositions for Zn, Mg, and Mn that depend on the deposition rate: 7 nm s −1 for Zn and 0.05 nm s −1 for Mn, which are higher and lower rates than those for Mg, respectively . Such R d dependence originates in the interaction between metal atoms and the surface during diffusion.…”
Section: Extension To Other Metal Speciesmentioning
confidence: 96%
“…The parameters other than T g that affect metal‐atom desorption are the metal‐atom deposition rate (density on the surface), substrate temperature, gas pressure during the metal evaporation, surface viscosity, and the metal species themselves. Low deposition rate, high temperature, low gas pressure, and/or low viscosity facilitate easy desorption.…”
Section: Selective Metal‐vapor Deposition On Amorphous Photochromic Dmentioning
confidence: 99%
“…Light-controlled selective metal deposition based on photochromism of diarylethene (DAE) derivatives is a promising method for metal patterning. 14,15 Organic photochromism is defined as the reversible structural interconversion between two isomers with different colors upon irradiation by light at different wavelengths. 16,17 Metal vapor is deposited on a colored amorphous DAE surface but not on an uncolored one.…”
Section: Introductionmentioning
confidence: 99%