LIGA process – micromachining technique using synchrotron radiation lithography – and some industrial applications

Hirata, Yoshihiro

doi:10.1016/s0168-583x(03)00632-3

Cited by 35 publications

(7 citation statements)

References 6 publications

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“…A comparison between the different technologies is proposed in [49]. Some technologies more efficient, but more complex, have also emerged, such as extreme UV, electron beam [35], ion beam LIGA [49] and synchrotron radiation LIGA (deep x-ray LIGA) [48,50,51]. A discussion concerning these different techniques is proposed by Watt [52], and an example of a part made with the LIGA technique is presented in figure 4.…”

Section: Ligamentioning

confidence: 99%

Microinjection molding of thermoplastic polymers: a review

Giboz¹,

Copponnex²,

Mélé³

2007

J. Micromech. Microeng.

464

328

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Microinjection molding (µIM) appears to be one of the most efficient processes for the large-scale production of thermoplastic polymer microparts. The microinjection molding process is not just a scaling down of the conventional injection process; it requires a rethinking of each part of the process. This review proposes a comparative description of each step of the microinjection molding process (µIM) with conventional injection molding (IM). Micromolding machines have been developed since the 1990s and a comparison between the existing ones is made. The techniques used for the realization of mold inserts are presented, such as lithography process (LIGA), laser micromachining and micro electrical discharge machining (µEDM). Regarding the molding step, the variotherm equipment used for the temperature variation is presented and the problems to solve for each molding phase are listed. Throughout this review, the differences existing between µIM and conventional molding are highlighted.

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Section: Ligamentioning

confidence: 99%

Microinjection molding of thermoplastic polymers: a review

Giboz¹,

Copponnex²,

Mélé³

2007

J. Micromech. Microeng.

464

328

View full text Add to dashboard Cite

show abstract

“…However, some properties of the parts fabricated by ECMM should be improved by controlling and optimizing the various parameters of the ECMM process, including the surface quality and material removal. The lithography (LIGA) based technology is also one of the promising technologies to fabricate the microscale structure [5]. However, most lithography (LIGA) based technologies are mainly used to machine quasi three-dimensional shapes without irregular and complex curvilinear three-dimensional (3-D) structures or high aspect ratio micro components.…”

Section: Introductionmentioning

confidence: 99%

Experimental and Numerical Investigations of a Novel Laser Impact Liquid Flexible Microforming Process

Liu

Jiang

et al. 2018

Metals

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A novel high strain rate microforming technique, laser impact liquid flexible embossing (LILFE), which uses laser induced shock waves as an energy source, and liquid as a force transmission medium, is proposed by this paper in order to emboss three-dimensional large area micro arrays on metallic foils and to overcome some of the defects of laser direct shock microembossing technology. The influences of laser energy and workpiece thickness on the deformation characteristics of the pure copper foils with the LILFE process were investigated through experiments and numerical simulation. A finite element model was built to further understand the typical stages of deformation, and the results of the numerical simulation are consistent with those achieved from the experiments. The experimental and simulation results show that the forming accuracy and depth of the embossed parts increases with the increase in laser energy and decrease in workpiece thickness. The thickness thinning rate of the embossed parts increases with the decrease of the workpiece thickness, and the severest thickness thinning occurs at the bar corner region. The experimental results also show that the LILFE process can protect the workpiece surface from being ablated and damaged, and can ensure the surface quality of the formed parts. Besides, the numerical simulation studies reveal the plastic strain distribution of embossed microfeatures under different laser energy.

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“…The MIP-lSL technology is an additive manufacturing (AM) approach for fabricating microstructures with three-dimensional (3D) complex geometry, especially with high aspect ratios [1][2][3][4][5]. Compared with other micro-manufacturing technologies such as lithography gavolnoforming abforming (LIGA) and micromachining [6,7], MIP-lSL technology has the merits of simpler processing, faster fabrication speed, lower machine cost, and better capability of fabricating complex geometry.…”

Section: Introductionmentioning

confidence: 99%

Fast Mask Image Projection-Based Micro-Stereolithography Process for Complex Geometry

Pan

Chen

Zhao

2017

Journal of Micro and Nano-Manufacturing

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In micro-stereolithograhy (μSL), high-speed fabrication is a critical challenge due to the long delay time for refreshing resin and retaining printed microfeatures. Thus, the mask-image-projection-based micro-stereolithograhy (MIP-μSL) using the constrained surface technique is investigated in this paper for quickly recoating liquid resin. It was reported in the literature that severe damages frequently happen in the part separation process in the constrained-surface-based MIP-μSL system. To conquer this problem, a single-layer movement separation approach was adopted, and the minimum delay time for refreshing resin was experimentally characterized. The experimental results verify that, compared with the existing MIP-μSL processes, the MIP-μSL process with single-layer movement separation method developed in this paper can build microstructures with complex geometry, with a faster build speed.

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LIGA process – micromachining technique using synchrotron radiation lithography – and some industrial applications

Cited by 35 publications

References 6 publications

Microinjection molding of thermoplastic polymers: a review

Microinjection molding of thermoplastic polymers: a review

Experimental and Numerical Investigations of a Novel Laser Impact Liquid Flexible Microforming Process

Fast Mask Image Projection-Based Micro-Stereolithography Process for Complex Geometry

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