“…12,13 In this context, reliability in respect to mechanical strength is an important issue, especially when the LTCC needs to fulfil not only the requirements of a functional, but also of a structural material subjected to high mechanical load. 14,15 Besides these applications, LTCC is most favourably used as substrate for micromachined devices and systems operated at high frequencies typically ranging up to the microwave region. Although there are also other types of high-density, multilayer substrates available, based on organic laminates, further outstanding features of the LTCC for this field of application are the excellent thermal conductivity compared to organic materials and a coefficient of thermal expansion close to that of silicon.…”