LGS-based SAW sensor that can measure pressure up to 1000 °C

Xue, Tao; Xu, Fangmeng; Tan, Qiulin; Yan, Xiawen; Liang, Xiaorui

doi:10.1016/j.sna.2021.113315

Cited by 16 publications

(15 citation statements)

References 15 publications

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“…1 lists the pressure sensitivities of SAW pressure sensors reported in some typical works. It can be found that the sensitivity in this work is higher than that reported in [3][4][5][6] and [13,14]. Then it is interesting to investigate the reasons for the high pressure sensitivity of our SAW pressure sensor.…”

Section: Resultsmentioning

confidence: 59%

“…On the other hand, the SAW pressure sensors reported in [3][4][5][6] and [13,14] are diaphragm-type SAW pressure sensors, which means that the SAW resonator was fabricated or pasted on the diaphragm. According to Sinha's research [8], the pressure subjected to the diaphragm could be regarded as biaxial stress (strain).…”

Section: Resultsmentioning

confidence: 99%

“…Therefore, the resonance frequency shifts will decrease due to the canceling effect of biaxial stress when the diaphragm is subjected to pressure. This canceling effect results in the relatively low sensitivity of diaphragm-type pressure sensors reported in [3][4][5][6] and [13,14]. In our SAW pressure sensor, due to the simply supported beam structure, uniaxial stress is applied along the long axis of the LNO substrate.…”

Section: Resultsmentioning

confidence: 99%

“…The sensitivity was improved to 228 ppm/MPa. Xue et al [5] developed a SAW pressure sensor using Langasite (LGS). The pressure sensitivity was up to 998 ppm/MPa by reducing diaphragm thickness to 30 μm.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Yang,

Peng,

Sun

et al. 2023

J. Phys.: Conf. Ser.

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In this work, a SAW pressure sensor based on a simply supported beam was designed and fabricated. The SAW resonator deposited on 128° YX-lithium niobate (LNO) substrate was used as the sensing element. The LNO substrate was used as a simply supported beam, therefore strain transfer loss was avoided and uniaxial stress was directly applied to the SAW resonator. An indenter with two ledges was used to indent the LNO beam and then uniform strain was applied to the SAW resonator. The sensitivity was experimentally measured in a pressure range of 330 kPa. The results demonstrated that the sensitivity of the SAW pressure sensor in this work was as high as 2514 ppm/MPa. The high pressure sensitivity of the proposed SAW pressure sensor was analyzed. The device structure of the proposed SAW pressure sensor may help to design highly sensitive SAW pressure sensors.

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Section: Resultsmentioning

confidence: 59%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

Yang,

Peng,

Sun

et al. 2023

J. Phys.: Conf. Ser.

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“…Examples of these factors include forest fire 1 , mining metallurgy, mine environmental monitoring 2 , industrial pipeline 3 , aircraft 4 , etc. Most sensors in the previous studies are only designed for measuring one parameter [5][6][7] . With the advancement of technology, single-chip integrated multi-sensor with small volume and high performance has emerged as a potential research hotspot.…”

Section: Introductionmentioning

confidence: 99%

Temperature/Pressure/Humidity Coplanar Integrated SAW Sensor Based on LGS

Tan

Liang

Zhang

et al. 2023

Preprint

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In this paper, a three-parameter coplanar-integrated surface acoustic wave sensor based on Langasite is proposed. The micro-scale multi-parameter coplanar Temperature-Pressure-Humidity (TPH) sensor was developed by Micro-Electro-Mechanical System (MEMS) techniques such as wet etching, hot pressing bonding, and lifting off. The Mxene@ MoS2@Go (MMG) composite material was used as the humidity-sensitive material to enlarge the range of the humidity test and improve the sensitivity of the sensor test, and the humidity-sensitive unit shows high performance with a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor has been tested, and the experimental results indicate that the sensor can operate steadily at 25–700°C, 0-700 kPa, and 10–98% RH. Besides, a temperature decoupling approach is presented to address the issue of multi-parameter mutual coupling and improve the measurement accuracy of the sensitive unit while measuring several parameters at the same time. These excellent results are attributed to the coupling between many parameters in complex environments. Also, our work can be applied to the simultaneous measurement of several parameters in challenging conditions.

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