Lens Testing with a Simple Wavefront Shearing Interferometer

Nyyssonen, Diana; Jerke, J. M.

doi:10.1364/ao.12.002061

Cited by 26 publications

(8 citation statements)

References 12 publications

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“…Since the objective in the photometric optical microscope is used on axis, we are primarily interested in the symmetric aberrations, viz, spherical aberration. A wavef ront-shearing interferometer developed at NHS [44] is currently being adapted to measure spherical aberration in microscope objectives.…”

Section: Comparison Of Theory and Experimental Datamentioning

confidence: 99%

Accurate linewidth measurements on integrated-circuit photomasks

Jerke¹

1980

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Section: Comparison Of Theory and Experimental Datamentioning

confidence: 99%

Accurate linewidth measurements on integrated-circuit photomasks

Jerke¹

1980

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“…Sen and Puntambekar suggested shearing interferometers for prism testing under manufacturing [15]. Nyyssonen et al presented a simple wavefront shearing interferometer for lens testing [16]. In addition, Merzkirch generally analyzed the shearing interferometer [17].…”

Section: Introductionmentioning

confidence: 99%

Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects

Seo

Kim

2014

Nanoscale Res Lett

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A new type of digital holographic microscopy based on a modified lateral shearing interferometer (LSI) is proposed for the detection of micrometer- or nanometer-scale defects on transparent target objects. The LSI is an attractive interferometric test technique because of its simple configuration, but it suffers from the so-called 'duplicate image’ problem, which originates from the interference of two sheared object beams. In order to overcome this problem, a modified LSI system, which employs a new concept of subdivided two-beam interference (STBI), is proposed. In this proposed method, an object beam passing through a target object is controlled and divided into two areas with and without object information, which are called half-object and half-reference beams, respectively. Then, these two half-beams make an interference pattern just like most two-beam interferometers. Successful experiments with a test glass panel for mobile displays confirm the feasibility of the proposed method and suggest the possibility of its practical application to the visual inspection of micrometer- or nanometer-scale defects on transparent objects.

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“…Transmission wavefront aberration of common lenses may be readily evaluated by means of the interferometer or Shack-Hartmann sensor (S-H sensor) [6][7][8]. There are various methods to measure EFL of lenses including, y'tan(θ ) method, Nodal slide method, Cornu method, Moire deflectometry, Talbot interferometry, Fizeau interferometry, and Shack -Hartmann wavefront analysis [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

A Study of Optical Properties of Intraocular Lenses and of Measurement of the Index of Reflection for an Unknown Liquid

Joo¹,

Jung²

2012

Journal of the Optical Society of Korea

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In general, such methods as interferometers or wavefront sensors are commonly used for testing of an optical system and optical components. In these cases, the surrounding environments are unlikely to affect the measurements. On the other hand, intraocular lenses of hydrophilic materials with special properties experience a certain difficulty in testing the optical properties. An intraocular lens is dried in the air, which causes deformation and changes the optical characteristics such as index of refraction and thickness. Thus, it is hard to measure the optical characteristics of an intraocular lens by using common methods. In this study, a special structure is used for measuring of the transmission wavefront aberration and effective focal length of an intraocular lens of hydrophilic materials by using a Shark-Hartmann sensor among the various measuring methods. As an application of this measuring method, this study shows a simple method to measure the index of refraction of unknown liquids with a plano-convex lens with a well known index of refraction. Also, this method is used to measure the optical properties of a plano-convex such as index of refraction and curvature by using a liquid with a well known index of refraction.

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Lens Testing with a Simple Wavefront Shearing Interferometer

Cited by 26 publications

References 12 publications

Accurate linewidth measurements on integrated-circuit photomasks

Accurate linewidth measurements on integrated-circuit photomasks

Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects

A Study of Optical Properties of Intraocular Lenses and of Measurement of the Index of Reflection for an Unknown Liquid

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