Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry

Zhonghua, 师中华 Shi; Baoxi, 杨宝喜 Yang; Xiaobang, 胡小邦 Hu; Chaoqun, 金超群 Jin; Zhangfan, 魏张帆 Wei; Jing, 李璟 Li; Huijie, 黄惠杰 Huang

doi:10.3788/aos201636.0612001

光学学报

2016

DOI: 10.3788/aos201636.0612001

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Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry

师中华 Shi Zhonghua¹,

杨宝喜 Yang Baoxi²,

胡小邦 Hu Xiaobang³

et al.

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Lens Surface Distance Measurement with Large Range and High Precision Based on Low Coherence Interferometry

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