Length scale measurement procedures at the National Bureau of Standards

Beers, John S.

doi:10.6028/nbs.ir.87-3625

Cited by 9 publications

(12 citation statements)

References 4 publications

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“…2. It is based on a line gauge calibration comparator with a sliding microscope (10) and a stationary scale (12). The comparator's frame (17) is made from granite and is mounted on vibration-proof supports (16), the microscope holder moves on air guides.…”

Section: Object Of Researchmentioning

confidence: 99%

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A vibration source in comparator

Kasparaitis

Vekteris

Kilikevichius

2006

Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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Oscillations of the comparator, which is used for the dynamic calibration of long optical line scales, are analyzed in the paper. The accuracy of determination of the position of optical lines on the scale depends on the velocity of the carriage, which transports the microscope with a CCD camera in relation to the line scale. Oscillations influence the velocity equability, its value, and at the same time the error compo measuring. The base part of the comparator is acted upon by external excitations which come through the foundation and supports, also due to natural frequencies of the comparator set. It is shown in the work that vibration surroundings acting on the comparator have a random character and correspond to the criteria of the normal (Gauss) distribution. It is proved experimentally that preaching amplitudes of measured components of vertical and horizontal oscillations influence the stability of the carriage movement which causes the error of measuring.

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Section: Object Of Researchmentioning

confidence: 99%

“…The lengths of the scale intervals obtained from the measuring system are recalculated for the 20 °C temperature. The line gauge calibration procedures are determined by documents [7,[8][9][10][11][12][13]. The impact of vibrations on the precision of calibration of line gauges is discussed in this paper.…”

Section: Introductionmentioning

confidence: 99%

A vibration source in comparator

Kasparaitis

Vekteris

Kilikevichius

2006

Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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“…These and other topics are discussed more fully in the references [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. The need to use good measurement techniques to achieve the best results with these linewidth standards cannot be overemphasized.…”

Section: Bmentioning

confidence: 99%

“…Before each complete SRM calibration, selected features on a control photomask are measured and compared with control history to ensure that the system has not changed or drifted. These selected features include spacing patterns 3E, 4F, and row 6 which have been independently calibrated by the Dimensional Metrology Group at NIST [4] to provide traceability to the standard meter. Each feature on the SRM being calibrated is then measured in sequence and the sequence repeated nine times.…”

Section: Srm Calibration Proceduresmentioning

confidence: 99%

Standard Reference Materials :

Varner¹,

Vezzetti²

1992

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“…Based on final report of EUROMET Key Comparison, EUROMET.L-K7 2006, supporting point was applied by other national metrology institutes (NMIs) even for a very short scale around 100 mm [5]. However, several publications explained that supporting points for short scale are not needed, because the method of supporting a scale only influences the long ones [6]. Sawyer et al also explained that error without supporting point in very short scales is negligible, however ignoring this error in long artifact above 700 mm may give a slight bend or some combination of these geometric errors [7].…”

Section: Introductionmentioning

confidence: 99%

Analysis of Airy Point Application on Line Scale Calibration in RCM Lipi

Kartika¹,

Alfiyati

2019

j. standard.

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Calibration of line scale in the Research Center for Metrology LIPI Indonesia (RCM-LIPI) is traceable to one dimensional measuring machine (SIP machine). Capability of the SIP machine table used as the base of line scale, however, covers only up to 400 mm and can be extended to 1000 mm using shifting methods. Supporting point as a method to maintain line scale still straight during measurement should be applied on machine table. For line scale ranged 400 mm, supporting point can be attached because the whole artefact is on the table, while some of the industrial instruments have scales above 400 mm, this mean slightly difficult to attach supporting point. This paper described an appropriate supporting points setting and their influence in line scale calibration ranged 500 mm by designed two systems supporting point attachment, they are L = 500 mm and L = 350 mm. As for the supporting points, airy points were used, because they were the most suitable for line scales with the pattern at the top plane. Each design is analysed using error graph and En score to determine the most suitable design for 500 mm line scale calibration.

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Length scale measurement procedures at the National Bureau of Standards

Cited by 9 publications

References 4 publications

A vibration source in comparator

A vibration source in comparator

Standard Reference Materials :

Analysis of Airy Point Application on Line Scale Calibration in RCM Lipi

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