Length and Displacement Measurement by Laser Interferometry

Bennett, Seton

doi:10.1007/978-94-009-6637-6_5

Search citation statements

Order By: Relevance

Paper Sections

Select...

Introduction1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

1991

2014

Publication Types

Select...

Other3

Article1

Relationship

Self Cite0

Independent4

Authors

Journals

Cited by 4 publications

(1 citation statement)

References 43 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Heterodyne displacement interferometry is a widely accepted methodology used for high resolution optical metrology [1][2][3]. Optical heterodyne interferometers are typically capable of measurements with sub-nanometer resolution and nanometerlevel uncertainty, that is, if the proper precautions are taken to ensure a confined environment and if a sufficiently frequency stabilized source is used [4,5].…”

Section: Introductionmentioning

confidence: 99%

Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration

Gillmer

Smith

Woody

et al. 2014

Meas. Sci. Technol.

View full text Add to dashboard Cite

Heterodyne displacement interferometry is a widely accepted methodology capable of measuring displacements with sub-nanometer resolution in many applications. We present a compact heterodyne system capable of simultaneously measuring Z-displacement along with changes in pitch and yaw using a single measurement beam incident on a plane mirror target. The interferometer's measurement detector utilizes differential wavefront sensing to decouple and measure these three degrees of freedom. Reliable rotational measurements typically require calibration; however, two analytical models are discussed which predict the readout of rotational scaling factors.

show abstract