LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Agouram, Saïd; Bodart, F.; Terwagne, G.

doi:10.1016/j.elspec.2003.10.004

Cited by 18 publications

(11 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…According to their work, the composition of Cr-N-O can be fitted only by Cr 2 O 3 with low CrN and CrO 2 , or CrO 2 stoichiometry predominates in the presence of low content of CrN. Other XPS results indicate the existence of a different compound with a (CrO 2 ) 3 -N stoichiometry [9]. Unfortunately, we estimated the chemical bonding states using only FT-IR, and the existence of (CrO 2 ) 3 -N was not observed in the present study.…”

Section: Resultsmentioning

confidence: 90%

See 1 more Smart Citation

Influence of oxygen content on structure and hardness of Cr–N–O thin films prepared by pulsed laser deposition

et al. 2006

View full text Add to dashboard Cite

Section: Resultsmentioning

confidence: 90%

“…Agouram et al [9] have produced Cr-N-O thin films by unbalanced magnetron sputtering and have reported attractive results. According to their work, the composition of Cr-N-O can be fitted only by Cr 2 O 3 with low CrN and CrO 2 , or CrO 2 stoichiometry predominates in the presence of low content of CrN.…”

Section: Resultsmentioning

confidence: 98%

Influence of oxygen content on structure and hardness of Cr–N–O thin films prepared by pulsed laser deposition

et al. 2006

View full text Add to dashboard Cite

“…Figure 2c displays that the binding energies of N1s peaked at 396.9 eV, 397.7 eV and 399.8 eV, which can be assign to Cr-N and W-N binding states, respectively [25,28]. The O1s spectrum in Figure 2d shows that the binding energies of the O1s peaked at 530.1, 530.7 and 531.8 eV, which can be assign to Cr-O, W-O and H-O states, respectively [31][32][33].…”

Section: Resultsmentioning

confidence: 95%

“…The O1s spectrum in Fig. 2(d) shows that the binding energies of the O1s peaked at 530.1, 530.7 and 531.8 eV, which can be assign to Cr-O, W-O and H-O states, respectively [31][32][33]. Figure 3 shows the surface images of the as-deposited coatings.…”

Section: Resultsmentioning

confidence: 99%

Thermal Stability of CrWN Glass Molding Coatings after Vacuum Annealing

Huang

Xie

et al. 2020

Coatings

View full text Add to dashboard Cite

CrWN glass molding coatings were deposited by plasma enhanced magnetron sputtering (PEMS). The microstructure and thermal stability of these coatings were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscope, transmission electron microscope, atomic force microscope and nanoindentation tests. The as-deposited coating exhibited an aggravated lattice expansion resulting in a constant hardness enhancement. The vacuum annealing induced surface coarsening and the spinodal decomposition of the coating accompanied by the formation of nm-sized c-CrN, c-W 2 N, and h-WN domains. The annealed coating with low W content had mainly a face-centered cubic (f.c.c) matrix, strain fields caused by lattice mismatch caused hardness enhancement. Following an increase in W content, the annealed coating showed a mixed face-centered cubic (f.c.c) and hexagonal close-packed (h.c.p) matrix. The large volume fraction of h-WN phases seriously weakened the coating strengthening effect and caused an obvious drop in hardness.Coatings 2020, 10, 198 2 of 11 manufacturing due to their excellent anti-sticking and anti-oxidation properties [10][11][12], but they are also expensive for their wide industrial applications. Diamond-like carbon (DLC) films exhibit good self-lubrication and anti-wear performance, however, their poor thermal stability greatly limits any molding application [13,14]. Recently, the application of transition metal nitride coatings to glass molding has received great interest due to the favorable chemical inertness and anti-wear properties of these materials [15][16][17][18]. Most current studies focus on the anti-sticking and anti-oxidation properties of transition metal nitride coatings. WCrN coatings have been reported to have good anti-sticking properties at 400 • C, but also exhibited poor anti-sticking performances at 500 • C due to the formation of oxides [19]. CrWN coatings have been reported to experience severe mechanical degradation and coarsening in high temperature nitrogen atmosphere due to the formation of WO 3 phases [20].The life of glass molding coatings is determined mainly by their anti-sticking and anti-oxidation properties, as well as by their thermal stability. However, relatively little work has been published on the thermal stability of this type of coatings. In this study, CrWN coatings with different W contents are synthesized using PEMS. Detailed characterizations of these coatings were performed to study the evolution of their microstructures, as well as the mechanical properties of the as-deposited coatings after vacuum annealing. The potential effect of the W content on the thermal stability of the annealed coatings will be discussed systematically in the following sections.

show abstract

“…The two low binding energy peaks of N5, and N6 were attributed to Cr 2 N [70], and CrN [71], respectively. The intensities of these two peaks increased dramatically, especially after 2 min plasma treatment (not shown here).…”

Section: Cntsmentioning

confidence: 99%

Synthesis and Electron Emission Properties of Aligned Carbon Nanotube Arrays

Neupane¹

View full text Add to dashboard Cite

LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Cited by 18 publications

References 15 publications

Influence of oxygen content on structure and hardness of Cr–N–O thin films prepared by pulsed laser deposition

Influence of oxygen content on structure and hardness of Cr–N–O thin films prepared by pulsed laser deposition

Thermal Stability of CrWN Glass Molding Coatings after Vacuum Annealing

Synthesis and Electron Emission Properties of Aligned Carbon Nanotube Arrays

Contact Info

Product

Resources

About