The structure of the V3xV3/?30° overlayer formed by CO molecules adsorbed on a Ru(0001) was analyzed by low energy electron diffraction. Anisotropic atomic motions under the influence of thermal excitation were taken into account by adopting the concept of split positions. Apart from considerable improvement in the structural refinement this technique provides information about dynamic processes. In particular, the molecular axis of the CO molecules was found to be tilted on the average by (12 ± 3)° at 150 K, which is attributed to excitation of the bending mode vibration (i.e., frustrated translation).PACS numbers: 68.35.Bs, 61.14.Hg, 68.45.DaThe influence of thermal vibrations at surfaces on the intensities in low energy electron diffraction (LEED) has long been recognized [1,2], but so far its impact on structural analysis has found only little attention. Usually the concept of an effective Debye-Waller factor characterized by a Debye temperature 0 is introduced as a correction to relate the scattering amplitudes with thermal vibrations [3,4]. If one assumes isotropic and uncorrelated displacements of the atoms, this concept leads to temperature-dependent phase shifts for the scattering of electrons in the multiple-scattering theory. In LEED structural analysis the Debye temperature 0 (which usually depends markedly on energy) may be treated as an additional fit parameter or is even kept constant. This approach works remarkably well in the LEED structural analysis of clean surfaces or simple adsorbate systems as demonstrated with numerous systems [5]. However, it is certainly a strong oversimplification since vibrations at surfaces are definitely anisotropic, in particular if these are adsorbate covered, and hence the several examples that exist in the literature with relatively poor agreement between experimental and calculated LEED intensity-voltage curves (as quantified by the resulting r factors) most likely have to be attributed to such an effect [6,7]. This conclusion is supported by comparison with x-ray structure analysis where low r factors and high accuracy of the structural data can only be reached by introduction of anisotropic or even anharmonic vibrations. For surface-sensitive diffraction techniques with dominant single-scattering events these effects have been partly involved [8-10].The first approach to take account of the influence of anisotropic vibrations on the LEED intensities was to multiply the layer scattering matrices with anisotropic temperature factors [11]. Further attempts to include anisotropic vibrations in intralayer multiple scattering were made by renormalization of the single-site scattering t matrix via an anisotropic Debye-Waller factor [12]. The applicability of this approach has not yet been sufficiently investigated.It is evident that proper inclusion of anisotropic temperature effects in the calculations of LEED intensities would improve the quality of structural refinements. Moreover, this approach might even provide additional information on the dynamics beyond that ...