Learning in the synthesis of data-driven variable-gain controllers

Heertjes, Marcel; Hunnekens, Bram; Wouw, Nathan van de; Nijmeijer, Henk

doi:10.1109/acc.2013.6580889

Cited by 7 publications

(6 citation statements)

References 23 publications

(23 reference statements)

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“…Second, a data-based approach will be presented, which is especially suitable for situations where machine measurements are available and when accurate modeling of the disturbances acting on the system is challenging if not impossible. This paper extends the preliminary results in [17,18] by (1) comparing the model-based optimization approach and the data-based approach and applying both to an experimental motion control system, and (2) applying the data-based piecewise affine variable gain controller synthesis approach to an industrial wafer scanner.…”

Section: Introductionmentioning

confidence: 90%

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Performance optimization of piecewise affine variable-gain controllers for linear motion systems

et al. 2014

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Section: Introductionmentioning

confidence: 90%

“…Using (17), we can write the gradients with respect to the switching lengths d i and a i as (see [18])…”

Section: Data-based Controller Synthesismentioning

confidence: 99%

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Performance optimization of piecewise affine variable-gain controllers for linear motion systems

et al. 2014

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“…with α 1 , α 2 ≥ 0 gains and δ 1 ≥ 0 the switching length; the example is taken from Heertjes et al (27) . Note that α 1 = 0 and α 2 = α gives the deadzone nonlinearity in (3), whereas α 1 = α and α 2 = 0 renders a saturation nonlinearity.…”

Section: Input-to-state Stability (Iss)mentioning

confidence: 99%

Variable Gain Motion Control of Wafer Scanners

Heertjes

2016

IEEJ Journal IA

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Over the past decade, variable gain control has aided both the positioning accuracy (overlay and imaging) and the productivity (throughput) of several motion systems in wafer scanners. In the control of wafer scanners, i.e., the lithographic machinery used to produce chips, nonlinear elements are traditionally used to linearize the feedback loop. In this paper, however, nonlinearity is introduced to de-linearize the feedback loop, which is carried out with the aim to better deal with design trade-offs. For wafer scanners, an overview is given of the most relevant nonlinear control designs, which are based on variable gains. This includes posing a framework not only for stability analysis in which (measured) frequency response functions are key in providing graphical checks, but also for discussing performance via nonlinear Bode diagrams.

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“…It is worth pointing out that finding the optimal gains for the controller is very crucial and challenging for achieving the best performance of vibration suppression in the control system, which is still an open research problem. The variable gain control methods have been developed by other researchers in various engineering applications previously [39][40][41][42][43]. Combining the variable gain control into the design of a vibration suppression strategy has the potential in improving the damping performance of the actuators.…”

Section: Introductionmentioning

confidence: 99%

Envelope-Based Variable-Gain Control Strategy for Vibration Suppression of Solar Array Using Reaction Wheel Actuator

Tang

Chen

2022

International Journal of Aerospace Engineering

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The orbital operation of spacecraft can excite the long-drawn and low-frequency vibration of the solar array, which is prone to affecting the task execution of the system. To address this issue, an envelope-based variable-gain control strategy is proposed to suppress vibration of the solar array using the reaction wheel (RW) actuator. The RW actuator is individually mounted on the solar array to provide reaction torque through the speed change of its rotor. The governing equation of motion of the solar array actuated by a RW actuator is deduced with the state space representation. The control relation between the measured bending moment and the rotational speed of the RW actuator with the constant-gain coefficient is firstly developed and demonstrated in numerical simulation. Changing the gain coefficient to be inversely proportional to the envelope function of vibration, a variable-gain control strategy is proposed to improve the damping effect of the RW actuator. Simulation results show that the vibration suppression performance of the RW actuator is improved compared to the constant-gain control. As the actual on-orbit natural frequency of the solar array is not always exactly known, the robustness of the control system is analyzed for the deviation between the estimated and the actual natural frequency values. The proposed variable-gain control is also experimentally verified using a simplified elastic plate model. Experimental results indicate that the vibration attenuation time is decreased to 29.1% and 50.22% compared to the uncontrolled and the constant-gain controlled states, respectively.

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Learning in the synthesis of data-driven variable-gain controllers

Cited by 7 publications

References 23 publications

Performance optimization of piecewise affine variable-gain controllers for linear motion systems

Performance optimization of piecewise affine variable-gain controllers for linear motion systems

Variable Gain Motion Control of Wafer Scanners

Envelope-Based Variable-Gain Control Strategy for Vibration Suppression of Solar Array Using Reaction Wheel Actuator

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