2006
DOI: 10.1088/0268-1242/21/4/009
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Leakage current characteristics and the energy band diagram of Al/ZrO2/Si0.3Ge0.7hetero-MIS structures

Abstract: Zirconium oxide (ZrO 2 ) films have been deposited on Ge-rich SiGe heterolayers at 150 • C by the microwave plasma enhanced chemical vapour deposition (PECVD) technique using zirconium tetra-tert-butoxide. The possible conduction mechanisms in deposited ZrO 2 films have been investigated at both room and high temperature. It is found that the conduction mechanism is dominated by Schottky emission at a low electric field (E < 1.2 MV cm −1 ). The intrinsic barrier height between Al and ZrO 2 was found to be 0.83… Show more

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Cited by 37 publications
(22 citation statements)
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“…The dielectric constant ( r ) 129.3) obtained from the slope of the straight line in the Poole-Frenkel plot also corresponds to that obtained from the C-V technique. 24 The NH 4 V 3 O 8 nanobelts are found to have some bulk and surface defects, as shown by triangles in Figure 3b. Therefore, the Poole-Frenkel emission in this case is the preferable mechanism that agrees with the results described in the reference.…”
Section: Resultsmentioning
confidence: 96%
“…The dielectric constant ( r ) 129.3) obtained from the slope of the straight line in the Poole-Frenkel plot also corresponds to that obtained from the C-V technique. 24 The NH 4 V 3 O 8 nanobelts are found to have some bulk and surface defects, as shown by triangles in Figure 3b. Therefore, the Poole-Frenkel emission in this case is the preferable mechanism that agrees with the results described in the reference.…”
Section: Resultsmentioning
confidence: 96%
“…One can see that the straight‐line dependence of E 1/2 on J at an electric field higher than 59 V cm −1 (applied voltage: 0.3 V), suggesting Schottky emission. Generally, the Schottky current is expressed as follows:29, 30 Here, A is a constant, Φ is the Schottky barrier height, q is the electrical charge, k is Boltzmann's constant, and E is the electric field. The constant β SE is given as follows: Here, ϵ 0 is the permittivity of the free space, and ϵ r is the dielectric constant.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 6 b shows the I – V curve on the scale of log( I ). As can be seen from Figure 6 b, at low electric fields the electrical conduction in the channel‐structured individual β ‐AgVO 3 fiber follows an ohmic mechanism; at medium electric fields, the straight‐line nature of the ln( J )≈ E 1/2 curve (inset I) implies Schottky emission;19, 20 at high electric fields, a straight line is obtained in the experimental plot of ln( J / E ) versus E 1/2 (inset II), which is related to the Pool–Frenkel mechanism, as described in the literature 19. 21 It is noted that the I – V plot of bulk single crystals of β ‐AgVO 3 (made by pressing the β ‐AgVO 3 powder into pellets under a pressure of 15 tons cm −2 ) mainly shows ohmic electrical transport.…”
mentioning
confidence: 92%