2002
DOI: 10.1557/proc-743-l3.41
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Lattice constant variation in GaN:Si layers grown by HVPE

Abstract: The structural, optical, and electrical properties of HVPE-grown GaN-on-sapphire templates were studied. The c and a lattice constants of the GaN layers were measured by x-ray diffraction. It was observed that the c and a lattice constants vary non-monotonically with Si-doping. The proper selection of Si-doping level and growth conditions resulted in controllable strain relaxation, and thus, influenced defect formation in GaN-on-sapphire templates. It was also observed that HVPE homoepitaxial GaN layers grown … Show more

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Cited by 5 publications
(3 citation statements)
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“…Si doping is known to improve crystalline quality of GaN‐based layers by decreasing of compressive stress usually observed in the GaN layers grown on sapphire and even by changing the stress from compressive to tensile . In addition, Si is a shallow donor in n‐GaN and high Si doping creates a large host of positively ionized donors Si + at the surface associated with the space charge region that has an electrical field and attracts more negative OH‐ ions in the KOH aqueous solution.…”
Section: Resultsmentioning
confidence: 99%
“…Si doping is known to improve crystalline quality of GaN‐based layers by decreasing of compressive stress usually observed in the GaN layers grown on sapphire and even by changing the stress from compressive to tensile . In addition, Si is a shallow donor in n‐GaN and high Si doping creates a large host of positively ionized donors Si + at the surface associated with the space charge region that has an electrical field and attracts more negative OH‐ ions in the KOH aqueous solution.…”
Section: Resultsmentioning
confidence: 99%
“…Although the value of the offset potential E3 of 0.67 V for InGaN/GaN (sample D) is higher than the offset potential E2 for GaN layers, the carrier leakage and defective regions at the InGaN sample surface cannot be ruled out. Doping of GaN layers with Si may result in improved crystalline quality due to lower threading dislocation densities, decreased compressive stress (or lattice parameters), and even reversal of stress from compressive to tensile [5,6].…”
Section: Resultsmentioning
confidence: 99%
“…( 13), a reduction of TDD is necessary to avoid the generation of tensile strain. [94] High-quality facet controlled epitaxial lateral overgrown (FACELO) substrate was reported to be effective in reducing the dislocation density of GaN, and could be used to relieve the tensile stress in Si-doped GaN. [84]…”
Section: Stress State In Si-doped Ganmentioning
confidence: 99%