Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient

Pop, Flavius; Kochhar, Abhay; Vidal-Álvarez, Gabriel; Piazza, Gianluca

doi:10.1109/memsys.2017.7863571

Cited by 37 publications

(12 citation statements)

References 12 publications

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“…It is a crystalline material and resonators must be fabricated via subtractive processes, posing some fabrication challenges. It has been used for both bulk and MEMS scale resonators [31], [35], [26], [27]. The lower dielectric constant of the material can be offset by operation at higher frequencies, which is now more practical due to advancements in widebandgap semiconductors.…”

Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

Optimized Resonators for Piezoelectric Power Conversion

Braun

Stolt

et al. 2021

IEEE Open J. Power Electron.

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The performance of inductors at high frequencies and small sizes is one of the largest limiting factors in the continued miniaturization of dc-dc converters. Piezoelectric resonators can have a very high quality factor and provide an inductive impedance between their series and parallel resonant frequencies, making them a promising technology for further miniaturizing dc-dc converters. In this paper we analyze the impact of resonator parameters on the performance of the piezoelectric resonator based dc-dc converter, derive the optimal load impedance and efficiency limits, and analyze the impacts of varying conversion ratio and load impedance. This work is accompanied by a prototype dc-dc converter using a piezoelectric resonator fabricated from lithium niobate. The piezoelectric resonator has a quality factor of 4178 and a coupling coefficient, k 2 t , of 29%. The converter is able to achieve high efficiency zero voltage switching and a continuously variable conversion ratio without the use of any discrete inductors. It achieves a maximum power output of 30.9 W at an efficiency of 95.2% with a power density of 6.76 W cm 3 .

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Section: Resonator Design and Fabrication A Materials And Resonanmentioning

confidence: 99%

Optimized Resonators for Piezoelectric Power Conversion

Braun

Stolt

et al. 2021

IEEE Open J. Power Electron.

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“…The BVD circuit elements fully parameterize the frequency (ω m = 1/ √ LC), piezoelectric coupling (k 2 = π 2 C/8C g ), and quality factor (Q = π 2 /8 ω m C R ). 29 Intriguingly, we find that while the quality factor of the resonators contributes to insertion loss in the passband as well as less sharply defined band edges, it is not a strong limiting factor in filter performance (Fig. 4b).…”

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confidence: 70%

Mechanical Purcell filters for microwave quantum machines

Cleland

Pechal

Stas

et al. 2019

Applied Physics Letters

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In circuit quantum electrodynamics, measuring the state of a superconducting qubit introduces a loss channel which can enhance spontaneous emission through the Purcell effect, thus decreasing qubit lifetime. This decay can be mitigated by performing the measurement through a Purcell filter which forbids signal propagation at the qubit transition frequency. If the filter is also well-matched at the readout cavity frequency, it will protect the qubit from decoherence channels without sacrificing measurement speed. We propose and analyze design for a mechanical Purcell filter, which we also fabricate and characterize at room temperature. The filter is comprised of an array of nanomechanical resonators in thin-film lithium niobate, connected in a ladder topology, with series and parallel resonances arranged to produce a bandpass response. The modest footprint, steep band edges, and absence of cross-talk in these filters make them a novel and appealing alternative to analogous electromagnetic versions currently used in microwave quantum machines.Quantum information processing calls for systems which are well isolated from their environment, whose states can nonetheless be measured and manipulated with precision. 1 These fundamentally contradictory requirements can be satisfied by cleverly engineering devices and interactions between them. In the circuit QED platform, 2-4 nonlinear superconducting circuits called qubits are used to store and process quantum information. Their internal states need to be read out rapidly and with low rates of error. An appealing approach for this is to couple the qubit circuit to an auxiliary, linear electromagnetic resonator (often called the readout cavity). Resonators have long been used to amplify emission from atoms, for instance, via Purcell enhancement. 5-7 Conversely, qubit emission into the environment can be suppressed by tuning the qubit away from the resonator's frequency by many times the linewidth and interaction energy. The qubit state is then measured "dispersively" by monitoring the resonator frequency for shifts induced by changes in the qubit state 3 (although we note that alternative measurement strategies exist). 8 Dispersive shifts of the cavity can be measured and amplified to demonstrate extremely efficient single-shot measurements of qubits using this scheme. 9,10 Nonetheless, the conflicting requirements of efficient readout and qubit isolation persist in the desired properties of the resonator. Fast, efficient readout requires strong coupling between the resonator and environment. This in turn increases the probability of qubit relaxation through the resonator in a process called Purcell decay. 5,[11][12][13] Purcell filters, often consisting of a second stage electromagnetic resonator, have been used effectively to mitigate this process. [14][15][16][17][18][19] As qubit coherence times continue to improve, the basic limit imposed by Purcell decay will become more important. In principle, progressively higher order electromagnetic filters can be incorporated, ...

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“…Thin-film LiNbO 3 has recently gained prominence in the realm of classical radio-frequency systems [18][19][20]. Here, device fabrication is performed on a 500-nm film of X-cut LiNbO 3 on a 500-μm high-resistivity (> 3 kΩ · cm) Si substrate and involves seven masks of lithography consisting of the following four stages [see Fig.…”

Section: Device Design and Fabricationmentioning

confidence: 99%

“…The gate electrodes used to address the phononic defect sites are patterned with a separate e-beam mask and normal-incidence Al evaporation, and finally, a bandage process [23] is used to ensure lossless superconducting connections between all metalization layers. As a final step, we release the structures with a masked XeF 2 dry etch that etches the underlying Si with extremely high selectivity to the LiNbO 3 and the Al [19,20], leaving all aluminum layers intact at the end of the process.…”

Section: Device Design and Fabricationmentioning

confidence: 99%

Coupling a Superconducting Quantum Circuit to a Phononic Crystal Defect Cavity

et al. 2018

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Connecting nanoscale mechanical resonators to microwave quantum circuits opens new avenues for storing, processing, and transmitting quantum information. In this work, we couple a phononic crystal cavity to a tunable superconducting quantum circuit. By fabricating a one-dimensional periodic pattern in a thin film of lithium niobate and introducing a defect in this artificial lattice, we localize a 6-GHz acoustic resonance to a wavelength-scale volume of less than 1 cubic micron. The strong piezoelectricity of lithium niobate efficiently couples the localized vibrations to the electric field of a widely tunable high-impedance Josephson junction array resonator. We measure a direct phonon-photon coupling rate g=2π ≈ 1.6 MHz and a mechanical quality factor Q m ≈ 3 × 10 4 , leading to a cooperativity C ∼ 4 when the two modes are tuned into resonance. Our work has direct application to engineering hybrid quantum systems for microwave-to-optical conversion as well as emerging architectures for quantum information processing.

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Laterally vibrating lithium niobate MEMS resonators with 30% electromechanical coupling coefficient

Cited by 37 publications

References 12 publications

Optimized Resonators for Piezoelectric Power Conversion

Optimized Resonators for Piezoelectric Power Conversion

Mechanical Purcell filters for microwave quantum machines

Coupling a Superconducting Quantum Circuit to a Phononic Crystal Defect Cavity

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