Abstract:The build‐up of interface states and oxide fixed charges in CMOS inverters during ionizing irradiation (γ‐60Co, X‐ray, 2.5 MeV electrons) is measured. The interface state spectrum in the inversion region is determined from the transfer characteristics by extending Sabnis' expression. Anomalous behaviour (increase of the transconductance) is found for the p‐channel FET, when UGS(irr) = 0 V: The laterally inhomogeneous field along the gate leads to preferential hole trapping in a small gate oxide region near the… Show more
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