Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications

Wen, Zhiwei; Liu, Wenjuan; Zeng, Min; Tong, Xin; Qu, Yuanhang; Liu, Yan; Cai, Yao; Sun, Chengliang

doi:10.1109/ic-mam60575.2024.10539035

2024 IEEE MTT-S International Conference on Microwave Acoustics &Amp;amp; Mechanics (IC-MAM) 2024

DOI: 10.1109/ic-mam60575.2024.10539035

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Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications

Zhiwei Wen,

Wenjuan Liu,

Min Zeng

et al.

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Laterally Excited Bulk Acoustic Resonators with Convex Interdigital Electrodes towards SHF Applications

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