2013
DOI: 10.1049/el.2013.1520
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Laterally‐coupled distributed feedback laser with first‐order gratings by interference lithography

Abstract: The first laterally-coupled distributed feedback (DFB) laser with firstorder sidewall gratings fabricated by optical interference lithography is experimentally demonstrated. The gratings were first etched into a dielectric mask on the planar top surface of an InP/AlGaInAs laser epiwafer, and then transferred to both sidewalls of a 2 µm deep ridgewaveguide structure using a novel self-aligned process. DFB ridgewaveguide lasers with a cavity length of 650 µm and width of 2.6 µm (with 300 nm gratings on both side… Show more

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Cited by 7 publications
(8 citation statements)
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“…shows the lasing wavelengths of the EACC DFB laser under different bias currents and temperatures. It can be seen that the lasing wavelength will have a red shift of about 12 pm/mA, which agrees well with the values previously reported for phase-shifted DFB lasers [9], this rate is lower than that of DFB lasers without a quarter-wave phase-shift (typically > 30 pm=mA [19]), thus the lasing mode of EACC DFB lasers with a %-EPS is more stable than the DFB lasers without phase-shift [22]. The wavelength shift with the current increasing is mainly caused by the bias current induced refractive index change and/or is caused by the instability of the lasing mode, and the wavelength red shift ratio with temperature is about 0.1 nm/ C.…”
Section: Fabrication and Experimental Resultssupporting
confidence: 90%
“…shows the lasing wavelengths of the EACC DFB laser under different bias currents and temperatures. It can be seen that the lasing wavelength will have a red shift of about 12 pm/mA, which agrees well with the values previously reported for phase-shifted DFB lasers [9], this rate is lower than that of DFB lasers without a quarter-wave phase-shift (typically > 30 pm=mA [19]), thus the lasing mode of EACC DFB lasers with a %-EPS is more stable than the DFB lasers without phase-shift [22]. The wavelength shift with the current increasing is mainly caused by the bias current induced refractive index change and/or is caused by the instability of the lasing mode, and the wavelength red shift ratio with temperature is about 0.1 nm/ C.…”
Section: Fabrication and Experimental Resultssupporting
confidence: 90%
“…To avoid the re-growth process, Goshima et al proposed a QD-based laterally coupled distributed feedback (LC-DFB) laser structure which was realized by deeply etching the grating vertically into the ridge waveguide, but low slope efficiencies below 0.03 W/A and small side-mode suppression ratio (SMSR) of 20 dB were observed due to large waveguide losses [ 10 ]. The waveguide losses are mainly from the deep etching process, by which the high-quality and uniform grating structure is very difficult to realize due to the technical issues of high aspect ratio (normally 20:1) requirement in either dry etching or wet etching process [ 11 ]. So, in order to realize a super high-performance DFB laser, it is necessary to trace a way to combine the optimized QD active region with improved device waveguide structure together.…”
Section: Introductionmentioning
confidence: 99%
“…[22][23][24][25] In additional recent work, improvements in low-loss, high-power operation have been achieved by etched lateral grating fabrication, 13 or by use of a twostep ridge etch process for minimal lateral current spreading. 26 On the other hand, higher side mode discrimination in relatively short cavities has been achieved by operation with a narrower ridge waveguide of 1.7 lm width, 27 introducing first-order 28,29 or optimized third-order [30][31][32][33][34] Bragg gratings on the ridge waveguide sidewalls, or by use of focused ion beam lithography (FIB) in LC-DFB 35 and LC-DBR 36,37 configurations. Notably, chirped CRW gratings for the better control over the coupling coefficient have been also investigated.…”
Section: Introductionmentioning
confidence: 99%