Abstract:The measurement error resulting from graduation anomalies and the signal processing algorithm used for determining the positions of graduations on line scales was investigated by simulation and experiment. Optical image-forming simulations were carried out on models of 6-µm-wide graduations with three sizes of defects (0.5, 1.0 and 1.5 µm) at one edge. A digital filter was used in signal processing to obtain the first differential to determine the positions of the graduations. The minimum values of the lateral… Show more
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