Lateral shearing interferometer with variable shearing for measurement of a small beam

Liu, Lei; Zeng, Aijun; Zhu, Linglin; Huang, Huijie

doi:10.1364/ol.39.001992

Cited by 11 publications

(3 citation statements)

References 12 publications

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“…It can produce an additional optical path difference (or phase difference) between two mutually perpendicular light components. Thanks to its unique polarization modulation characteristics, the waveplate has been widely used in various optical systems, such as interferometry [1,2], polarimeter/ellipsometry [3][4][5][6][7][8][9], birefringent filters [10,11], etc. Meanwhile, with the development of material technologies, the materials of waveplates are no longer limited to traditional quartz, and cover a much wider and richer range, including gypsum, LiTaO 3 , ZnO, etc.…”

Section: Introductionmentioning

confidence: 99%

Calibration of Waveplate Retardance Fluctuation Due to Field-of-View Effect in Mueller Matrix Ellipsometer

Jiang,

Zhang,

Jiang

et al. 2023

Photonics

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Leveraging their unique phase modulation characteristics, birefringent waveplates have been widely used in various optical systems. With the development of material science and manufacturing techniques, the polarization properties of waveplates have become increasingly complex and diverse. Among these properties, the field-of-view effect of the waveplate caused due to manufacturing defects or improper installation procedures is extremely difficult to calibrate and seriously affects the precision and accuracy of the relevant optical systems. In this paper, a calibration method that can compensate for the field-of-view effect of waveplates installed in the instrument is proposed. Moreover, to approve the fidelity of the proposed calibration method, a series of film thickness measurement experiments are carried out. The results show that under different installation conditions of the waveplates, the precision and accuracy of the film thickness measured with the proposed method significantly improved. This method can be expected to reduce the assembly difficulty of such optical systems, while also improving their accuracy and stability.

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Section: Introductionmentioning

confidence: 99%

Calibration of Waveplate Retardance Fluctuation Due to Field-of-View Effect in Mueller Matrix Ellipsometer

Jiang,

Zhang,

Jiang

et al. 2023

Photonics

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show abstract

“…Waveplates made of birefringent materials are basic polarization elements and widely used in optical systems, such as ellipsometry/polarimetry [1,2], interferometry [3,4], tomography [5], cryptography [6] and laser systems [7], to control and manipulate the polarization states of a polarized light. A composite waveplate (CW) consisting of multiple single waveplates can be specially designed and applied as a linear retarder [8], an optical rotator (namely a circular retarder) [9], an elliptical retarder [2], or an elliptical polarizer [10] in the systems.…”

Section: Introductionmentioning

confidence: 99%

Comprehensive characterization of a general composite waveplate by spectroscopic Mueller matrix polarimetry

Chen

Shi

et al. 2018

Opt. Express

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Composite waveplates (CWs) consisting of multiple single waveplates are basic polarization elements and widely used to manipulate the polarized light in optical systems, and their performances affect the final accuracy and precision significantly. This research proposes a method for the comprehensive characterization of an arbitrary CW based on spectroscopic Mueller matrix polarimetry. An analytical model is established to describe a general CW by extending Jones' equivalent theorem with Mueller matrix calculus. In this model, an arbitrary CW is optically equivalent to a cascaded system consisting of a linear retarder with slight diattenuation followed by an optical rotator, and its polarization properties are completely described by four polarization parameters, including the retardance, the fast axis azimuth, the rotation angle, and the diattenuation angle. Analytical relations between the polarization properties, the structure, and the Mueller matrix of the CW are then derived from the established model. By the proposed method, the polarization parameters of an arbitrary CW can be comprehensively characterized over an ultra-wide spectral range via only one measurement. Moreover, the actual structure of the CW, including the thicknesses and fast axis azimuths of the single waveplates, as well as the axis alignment errors, can be completely reconstructed from the polarization spectra. Experiments performed with a house-developed broadband Mueller matrix polarimeter on three typical CWs including a compound zero-order waveplate, an achromatic waveplate and a specially designed biplate have demonstrated the capability of the proposed method.OCIS codes: (120.0120) Instrumentation, measurement, and metrology; (120.2130) Ellipsometry and polarimetry; (230.5440) Polarization-selective devices; (260.5430) Polarization; (120.6200) Spectrometers and spectroscopic instrumentation. with a waveplate in the external cavity," Opt. Lett. 40(15), 3615-3618 (2015). 8. J. L. Vilas and A. Lazarova-Lazarova, "A simple analytical method to obtain achromatic waveplate retarders," J.

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“…the ordinary and extraordinary rays (o-ray and e-ray respectively)). They are indispensable elements in various optical systems, such as polarimetry/ellipsometry [1][2][3], interferometry [4,5], etc. and the performance of these systems heavily depends on the waveplate polarization properties [6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Study of the retardance of a birefringent waveplate at tilt incidence by Mueller matrix ellipsometer

Chen

Zhang

et al. 2017

J. Opt.

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Birefringent waveplates are indispensable optical elements for polarization state modification in various optical systems. The retardance of a birefringent waveplate will change significantly when the incident angle of the light varies. Therefore, it is of great importance to study such field-of-view errors on the polarization properties, especially the retardance of a birefringent waveplate, for the performance improvement of the system. In this paper, we propose a generalized retardance formula at arbitrary incidence and azimuth for a general plane-parallel composite waveplate consisting of multiple aligned single waveplates. An efficient method and corresponding experimental setup have been developed to characterize the retardance versus the field-of-view angle based on a constructed spectroscopic Mueller matrix ellipsometer. Both simulations and experiments on an MgF 2 biplate over an incident angle of 0°-8°and an azimuthal angle of 0°-360°are presented as an example, and the dominant experimental errors are discussed and corrected. The experimental results strongly agree with the simulations with a maximum difference of 0.15°over the entire field of view, which indicates the validity and great potential of the presented method for birefringent waveplate characterization at tilt incidence.

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Lateral shearing interferometer with variable shearing for measurement of a small beam

Cited by 11 publications

References 12 publications

Calibration of Waveplate Retardance Fluctuation Due to Field-of-View Effect in Mueller Matrix Ellipsometer

Calibration of Waveplate Retardance Fluctuation Due to Field-of-View Effect in Mueller Matrix Ellipsometer

Comprehensive characterization of a general composite waveplate by spectroscopic Mueller matrix polarimetry

Study of the retardance of a birefringent waveplate at tilt incidence by Mueller matrix ellipsometer

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