Lateral-Field Excitation of Quartz Plates

Hatch, E.R.; Ballato, A.

doi:10.1109/ultsym.1983.198107

Cited by 32 publications

(6 citation statements)

References 6 publications

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“…This causes the main electric field component being in the plane of the disk (z-direction). The established TSM excitation as it is known from common QCRs applies an electric field perpendicular to the disc surface [1]. Table 1 summarizes main properties for piezoelectric transducers in thickness (TE) and lateral excitation [2].…”

Section: Motivationmentioning

confidence: 99%

Application of a Lateral Field Excited Acoustic Wave Device as a New Sensor Principle in Biointerface Analysis

Hempel

Lücklum

Hauptmann

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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AT-cut quartz crystals have been excited by applying a lateral electric field in the plane of the disk. Deposition of self-assembled monolayers proves the expected sensitivity of the sensor to small mass changes. When subjected to a liquid acoustic load the sensor exhibits an extremely high sensitivity to permittivity and conductivity of the liquid. In combination with an additional artificial interface layer, the influence on the resonance will be discussed in terms of reorganization of the electric field distribution within the quartz. Due to the mechanical and electrical nature of medium-sensor-interaction, access to interfacial properties is anticipated.

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Section: Motivationmentioning

confidence: 99%

Application of a Lateral Field Excited Acoustic Wave Device as a New Sensor Principle in Biointerface Analysis

Hempel

Lücklum

Hauptmann

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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“…189,[208][209][210][212][213][214][215]222,362,363 Both TE and LE types were used in the classical experiments of Atanasoff and Hart, 307 but the wider use of LE is more recent. [364][365][366][367][368][369][370][371][372][373][374][375][376][377] The early works on piezoelectric plate vibrations included those of Koga 80,81,301 and Cady. 304 In these papers, it was recognized that the piezoelectric effect provided the mechanism for driving the motions; however, the incorporation of the effect into the pertinent equations was accomplished in an ad hoc manner.…”

Section: Piezoelectric Crystal Plate Vibrationsmentioning

confidence: 99%

“…The discovery of the temperature compensated quartz AT and BT cuts, and their applications for frequency control and timing assured the success of this technological art 189,208–210,212–215,222,362,363 . Both TE and LE types were used in the classical experiments of Atanasoff and Hart , 307 but the wider use of LE is more recent 364–377 …”

Section: History and Development Of The Subjectmentioning

confidence: 99%

Acoustic properties of piezoelectric cubic crystals

Ballato

2023

Int J Ceramic Engine & Sci

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This paper is offered as a complementary adjunct to the many treatments of the electronic and photonic properties of cubic III–V and II–VI compounds appearing in the literature. These crystals typically exhibit piezoelectricity, due to the molecular dissymmetry, thereby allowing the inclusion of classical mechanical/acoustic features along with the quantum. We discuss the history of this modality and then illustrate its use by applying it to an electro‐elastic problem that has the estimable virtues of having an exact solution, along with wide practical applicability: determination of the piezocoupling values governing the excitation of thickness vibrations in thin cubic films or plates of arbitrary crystallographic orientation by electric fields directed either along, or lateral to, the thickness. Explicit results are given for orientations along the great‐circle paths connecting the principal directions [100], [110], and [111]. The formalism is then applied to GaAs as an example; it is further demonstrated that various results, such as the orientational variations of piezocoupling factors, are generally applicable to other members of the III–V and II–VI families by scaling. Ancillary aspects, such as errors due to misorientations, nonlinearities, and equivalent circuit representations, are described and discussed. This work is dedicated to Gerald W. Farnell (1925–2015), Prof. Emeritus, McGill University, Montréal, Canada.

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“…Lateral field excitation of piezoelectric crystals has been used since 1941, when Atanasoff and Hart [34] determined the elastic parameters of quartz crystals using this method. Since then research has been performed on the lateral field excitation of piezoelectric crystals for their use as bulk resonant filters [35][36][37][38][39][40][41][42][43][44][45]. Although Vig and Ballato [46,47] suggested the possibility of LFE devices as sensors, Vetelino et al [48][49][50] were the first to use LFE devices as sensors.…”

Section: Lateral Field Excited (Lfe) Sensor Platformmentioning

confidence: 99%

Recent advances in lateral field excited and monolithic spiral coil acoustic transduction bulk acoustic wave sensor platforms

McCann¹,

French²,

Wark³

et al. 2009

Meas. Sci. Technol.

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The quartz crystal microbalance (QCM) has been used extensively as a bulk acoustic wave (BAW) platform for applications such as chemical and biological sensors and rate monitors in thin film deposition systems. Although the QCM is capable of measuring mechanical property changes critical in many thin film deposition systems, it cannot measure electrical property changes that can occur in many sensor applications. In this paper we review the recent developments of two novel transducer configurations for BAW sensors. In the first sensor, called the lateral field excited (LFE) sensor, the transverse shear mode (TSM) in AT-cut quartz is excited by two electrodes on the reference surface, resulting in a bare sensing surface which allows both electrical and mechanical properties of target analytes to be measured. In the second sensor, called the monolithic spiral coil acoustic transduction (MSCAT) sensor, the TSM is excited by a photolithographically deposited spiral antenna on the reference surface which can excite high-order harmonics in the substrate, and potentially lead to increased sensitivity. The responses of both the LFE and MSCAT sensors to electrical and mechanical property changes of liquids have been examined and compared to the response of the standard QCM. In addition, results relating to the detection of chemical and biological target analytes using the LFE and MSCAT sensor platforms are presented.

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Lateral-Field Excitation of Quartz Plates

Cited by 32 publications

References 6 publications

Application of a Lateral Field Excited Acoustic Wave Device as a New Sensor Principle in Biointerface Analysis

Application of a Lateral Field Excited Acoustic Wave Device as a New Sensor Principle in Biointerface Analysis

Acoustic properties of piezoelectric cubic crystals

Recent advances in lateral field excited and monolithic spiral coil acoustic transduction bulk acoustic wave sensor platforms

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