Lateral-Field Excitation of Berlinite

Ballato, A.; Hatch, E.R.; Mizan, M.; Chai, B.H.T.; Tilton, Richard; Lukaszek, T.

doi:10.1109/freq.1984.200757

Cited by 19 publications

(5 citation statements)

References 39 publications

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“…The viscosity loss in quartz can obscure mode coupling on the loci of admittance. However, as mode coupling depends on temperature, 7,22) we expected that coupling phenomena could be observed in the temperature behavior of the frequency and conductance of the main TS response. The plate of a=b ¼ 126:93 was again selected to examine this, because the lossless plate exhibited strong coupling at room temperature T 0 ¼ 25 C. For simplicity, we assumed that the temperature-dependent material properties were stiffnesses and thermal expansions in quartz, and that the thermal expansions in electrodes were the same as those in quartz.…”

Section: Numerical Resultsmentioning

confidence: 97%

Influence of Viscosity Loss on Coupled Vibrations of Ultrahigh Frequency AT-Cut Quartz Plates

Sekimoto

Onozaki

Goka

et al. 2006

jjap

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We numerically analyze the influence of viscosity loss in quartz on the unwanted coupling between fundamental thicknessshear (TS) and spurious modes. Classical mode-matching is used to solve the two-dimensional coupled vibrations in an ATcut quartz plate with an inverted-mesa shape. Using this technique, we calculate the loci of admittance near the main TS response as a function of the loss factor. The temperature behavior of frequency and conductance is also examined for the main TS resonance. The results reveal that, for two strongly coupled vibrations of TS and spurious modes, two resonances on the real frequency-axis are combined into one with increasing loss, although there are still two resonances in the complex frequency plane. We also find that the conductance-temperature behavior of the main TS response is more sensitive to mode coupling than the frequency-temperature behavior, and it therefore works well as a detector of mode coupling.

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Section: Numerical Resultsmentioning

confidence: 97%

Influence of Viscosity Loss on Coupled Vibrations of Ultrahigh Frequency AT-Cut Quartz Plates

Sekimoto

Onozaki

Goka

et al. 2006

jjap

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“…If there are no additional dielectric layers, i.e. Z 1 = Z 2 = 0, Equation () simplifies to a known form [11, 12], α = 1:

Y = j ω C_{s t} (1 + α \frac{K^{2}}{q \frac{t}{2}} \tan (q \frac{t}{2}))

This formula is similar to that for impedance Z of the transversely excited FBAR (ignoring the finite thickness of the metal electrodes) [9]:

Z_{F B A R} = \frac{1}{j ω C_{s t}} (1 - \frac{k_{t}^{2}}{q_{p} \frac{t}{2}} \tan (q_{p} \frac{t}{2}))

However, there are some important differences. (i) The resonance of the admittance in XBARs, which happens when

\tan (q \cdot \frac{t}{2}) \to \infty

, i.e.…”

Section: Formula Analysismentioning

confidence: 99%

“…Formula analysis: If there are no additional dielectric layers, i.e. Z 1 = Z 2 = 0, Equation (4) simplifies to a known form [11,12], α = 1:…”

Section: Fig 1 (A) Transversely and (B) Laterally Excited Membrane Re...mentioning

confidence: 99%

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A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Plessky

Kucuk

Yandrapalli

et al. 2021

Electronics Letters

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The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of anti‐symmetric Lamb mode A1 by the interdigital transducer. However, it can also be seen as the generation of fundamental plate resonances in a set of parallelly connected quasi‐independent resonators, excited by a lateral electric field created by narrow electrodes with alternating polarity. By exploiting this latter interpretation, we propose a formula for the admittance of multi‐layered membranes, including the main piezoelectric layer of suitable orientation and different additional dielectric layers on both sides of the membranes. The structure can be asymmetric and the excitation of all shear wave thickness resonances, not only with odd numbers, is described. The formula can be used for the one‐dimensional modelling and optimisation of XBARs and the estimation of the resonance frequency dependence on the deposited trimming thin layers.

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“…Lateral field excitation of piezoelectric crystals has been used since 1941, when Atanasoff and Hart [34] determined the elastic parameters of quartz crystals using this method. Since then research has been performed on the lateral field excitation of piezoelectric crystals for their use as bulk resonant filters [35][36][37][38][39][40][41][42][43][44][45]. Although Vig and Ballato [46,47] suggested the possibility of LFE devices as sensors, Vetelino et al [48][49][50] were the first to use LFE devices as sensors.…”

Section: Lateral Field Excited (Lfe) Sensor Platformmentioning

confidence: 99%

Recent advances in lateral field excited and monolithic spiral coil acoustic transduction bulk acoustic wave sensor platforms

McCann¹,

French²,

Wark³

et al. 2009

Meas. Sci. Technol.

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The quartz crystal microbalance (QCM) has been used extensively as a bulk acoustic wave (BAW) platform for applications such as chemical and biological sensors and rate monitors in thin film deposition systems. Although the QCM is capable of measuring mechanical property changes critical in many thin film deposition systems, it cannot measure electrical property changes that can occur in many sensor applications. In this paper we review the recent developments of two novel transducer configurations for BAW sensors. In the first sensor, called the lateral field excited (LFE) sensor, the transverse shear mode (TSM) in AT-cut quartz is excited by two electrodes on the reference surface, resulting in a bare sensing surface which allows both electrical and mechanical properties of target analytes to be measured. In the second sensor, called the monolithic spiral coil acoustic transduction (MSCAT) sensor, the TSM is excited by a photolithographically deposited spiral antenna on the reference surface which can excite high-order harmonics in the substrate, and potentially lead to increased sensitivity. The responses of both the LFE and MSCAT sensors to electrical and mechanical property changes of liquids have been examined and compared to the response of the standard QCM. In addition, results relating to the detection of chemical and biological target analytes using the LFE and MSCAT sensor platforms are presented.

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Lateral-Field Excitation of Berlinite

Cited by 19 publications

References 39 publications

Influence of Viscosity Loss on Coupled Vibrations of Ultrahigh Frequency AT-Cut Quartz Plates

Influence of Viscosity Loss on Coupled Vibrations of Ultrahigh Frequency AT-Cut Quartz Plates

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Recent advances in lateral field excited and monolithic spiral coil acoustic transduction bulk acoustic wave sensor platforms

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