Latching microelectromagnetic relays

Ruan, M.; Shen, Jun; Wheeler, C B

doi:10.1016/s0924-4247(01)00606-9

Cited by 47 publications

(22 citation statements)

References 4 publications

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“…The evolution of the devices from simple switch configurations and actuation mechanisms into more complex and diverse architectures is evident, and it reflects the improvements in design and manufacturing achieved in recent years. Electromagnetic [78,83], electrothermal [80] and piezoelectric [82] devices offer low actuation voltages, albeit requiring constant power [78,80] or the use of permanent magnets [83] to maintain the ON state, or present significant manufacturing challenges [82]. Electrostatic devices, on the contrary, can be produced with simpler manufacturing processes, but require higher actuation voltages.…”

Section: Examples Of Generic Mems Switches With Various Actuation Schmentioning

confidence: 99%

“…Despite the tremendous advances in the performance of electrostatic MEMS switches, electromagnetic devices [78,83] can achieve actuation with lower voltages without the need for particular design improvements. Section 3 details the specific advantages and drawbacks of magnetic MEMS switches compared to electrostatic architectures.…”

Section: Examples Of Generic Mems Switches With Various Actuation Schmentioning

confidence: 99%

“…Additionally the presence of two contacts doubles the probability of failures as outlined in Section 2.2.3. [78,134] One of the first attempts to produce magnetically actuated microrelay with latching functionality was reported in 2001 by Ruan et al [78,134]. A bistable configuration is achieved by the superimposition of two magnetic effects.…”

Section: Taylor Et Al (1998)mentioning

confidence: 99%

“…A hinged Ni-Fe cantilever is surface micromachined on top of a planar Ag patterned coil, and the whole assembly is then mounted on top of a permanent magnet, as illustrated in Figure 10. [78]. The device is mounted on a permanent magnet that provides the field needed for the operation.…”

Section: Taylor Et Al (1998)mentioning

confidence: 99%

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Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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Section: Examples Of Generic Mems Switches With Various Actuation Schmentioning

confidence: 99%

Section: Examples Of Generic Mems Switches With Various Actuation Schmentioning

confidence: 99%

Section: Taylor Et Al (1998)mentioning

confidence: 99%

Section: Taylor Et Al (1998)mentioning

confidence: 99%

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Integrated Magnetic MEMS Relays: Status of the Technology

2014

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“…Both new magnetic materials and technology for microcoil are studied for improving generation of high magnetic fields. In the later case, planar microcoils are extensively used for actuation of relays [1], membranes for pump or valve [2,3] or flexible beams [4]. In addition to long range and high density energy, other advantages of magnetic actuation are the facility to process arrays of microcoils [5,6] and to improve the magnetic field by mutuality of several coils.…”

Section: Introductionmentioning

confidence: 99%

Copper planar microcoils applied to magnetic actuation

et al. 2007

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Recent advances in microtechnology allow realization of planar microcoils. These components are integrated in MEMS as magnetic sensor or actuator. In the latter case, it is necessary to maximize the effective magnetic field which is proportional to the current passing through the copper track and depends on the distance to the generation microcoil. The aim of this work was to determine the optimal microcoil design configuration for magnetic field generation. The results were applied to magnetic actuation, taking into account technological constraints. In particular, we have considered different realistic configurations that involve a magnetically actuated device coupled to a microcoil. Calculations by a semianalytical method using Matlab software were validated by experimental measurements. The copper planar microcoils are fabricated by U.V. micromoulding on different substrates: flexible polymer (Kapton®) and silicate on silicon. They are constituted by a spiral-like continuous track. Their total surface is about 1 mm 2 .

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NEMS Switch Technology

Hutin¹,

Liu²

2014

Emerging Nanoelectronic Devices

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Latching microelectromagnetic relays

Cited by 47 publications

References 4 publications

Integrated Magnetic MEMS Relays: Status of the Technology

Integrated Magnetic MEMS Relays: Status of the Technology

Copper planar microcoils applied to magnetic actuation

NEMS Switch Technology

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