1999
DOI: 10.1063/1.371253
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Lasers in dense gases pumped by low-energy electron beams

Abstract: Articles you may be interested inInhibiting spontaneous etching of nanoscale electron beam induced etching features: Solutions for nanoscale repair of extreme ultraviolet lithography masks The use of low-energy ͑Ϸ15 keV͒ electron beams for pumping laser systems in dense gases with high specific power deposition is described. Thin ͑300 nm͒ SiN x ceramic foils used as entrance window in a transverse geometry for the electron beam allows pressure differentials of several atmospheres with low percentage energy los… Show more

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Cited by 26 publications
(17 citation statements)
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(19 reference statements)
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“…Note, that small beam pumped volumes can also be more easily combined with stable optical laser resonators. Demonstration of laser effect has already been achieved for an infrared Ar-Xe laser operating at a wavelength of 1.73 µm [20]. This laser system is now being studied in more detail in preparation of experiments at shorter wavelengths.…”
Section: Miniature Electron Beam Pumped Lasersmentioning
confidence: 99%
“…Note, that small beam pumped volumes can also be more easily combined with stable optical laser resonators. Demonstration of laser effect has already been achieved for an infrared Ar-Xe laser operating at a wavelength of 1.73 µm [20]. This laser system is now being studied in more detail in preparation of experiments at shorter wavelengths.…”
Section: Miniature Electron Beam Pumped Lasersmentioning
confidence: 99%
“…1,2 Although thermal cathodes have previously been used as electron sources in these experiments, they require a power supply for heating and are difficult to incorporate into a truly compact system. Recently, light emission based on the excitation of rare gases by a low energy dc electron beam ͑less than 30 keV͒ has become a promising approach for realizing deep-or vacuum-ultraviolet light sources or lasers that are compact and have high efficiency.…”
Section: Introductionmentioning
confidence: 99%
“…Light emission based on the excitation of rare gases by a low-energy DC electron beam (less than 30 keV) is a promising approach for realizing deep-or vacuumultraviolet light sources or lasers that are compact and have a high efficiency [1,2]. Although thermal cathodes have previously been used as electron sources in these experiments, they require power supply for heating and are difficult to incorporate into a truly compact system.…”
Section: Introductionmentioning
confidence: 99%